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Plasma Sci. Technol. ›› 2018, Vol. 20 ›› Issue (1): 14005-014005.

• 18届全国等离子体科学和技术会议 • 上一篇    下一篇

Effects of direct current discharge on the spatial distribution of cylindrical inductivelycoupled plasma at different gas pressures

Yue HUA (滑跃), Jian SONG (宋健), Zeyu HAO (郝泽宇), Gailing ZHANG (张改玲) and Chunsheng REN (任春生)   

  1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of
    Technology), Ministry of Education, Dalian 116024, People’s Republic of China
  • 出版日期:2017-12-04 发布日期:2017-12-07

Effects of direct current discharge on the spatial distribution of cylindrical inductivelycoupled plasma at different gas pressures

Yue HUA (滑跃), Jian SONG (宋健), Zeyu HAO (郝泽宇), Gailing ZHANG (张改玲) and Chunsheng REN (任春生)   

  1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of
    Technology), Ministry of Education, Dalian 116024, People’s Republic of China
  • Online:2017-12-04 Published:2017-12-07
  • Supported by:

    This work is supported by National Natural Science Foundation of China under Grant No. 11475038.

Abstract:

Stable operations of single direct current (DC) discharge, single radio frequency (RF) discharge and DC?+?RF hybrid discharge are achieved in a specially-designed DC enhanced inductivelycoupled plasma (DCE-ICP) source. Their plasma characteristics, such as electron density, electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ‘convex’ shape and ‘saddle’ shape at gas pressures of 3 mTorr and 150 mTorr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure. Moreover, in the operation of DC+RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 mTorr where local electron kinetics is dominant, whereas plasma uniformity deteriorates at a low pressure of 3 mTorr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.

Key words: cylindrical inductively-coupled plasma, DC + RF hybrid discharge, plasma uniformity, gas pressure

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