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Plasma Sci. Technol. ›› 2018, Vol. 20 ›› Issue (1): 14011-014011.doi: 10.1088/2058-6272/aa8c6e

• 18届全国等离子体科学和技术会议 • 上一篇    下一篇

Plasma surface treatment of Cu by nanosecond-pulse diffuse discharges in atmospheric air

Cheng ZHANG (章程)1,2, Jintao QIU (邱锦涛)1,2, Fei KONG (孔飞)1,2, Xingmin HOU (侯兴民)1,2, Zhi FANG (方志)3, Yu YIN (殷禹)4 and Tao SHAO (邵涛)1,2,5   

  1. 1 Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, People’s Republic of China
    2 University of Chinese Academy of Sciences, Beijing 100039, People’s Republic of China
    3 School of Automation and Electrical Engineering, Nanjing University of Technology, Nanjing 210009, People’s Republic of China
    4 China Electric Power Research Institute, Beijing 100192, People’s Republic of China
  • 出版日期:2017-12-04 发布日期:2017-12-07

Plasma surface treatment of Cu by nanosecond-pulse diffuse discharges in atmospheric air

Cheng ZHANG (章程)1,2, Jintao QIU (邱锦涛)1,2, Fei KONG (孔飞)1,2, Xingmin HOU (侯兴民)1,2, Zhi FANG (方志)3, Yu YIN (殷禹)4 and Tao SHAO (邵涛)1,2,5   

  1. 1 Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, People’s Republic of China
    2 University of Chinese Academy of Sciences, Beijing 100039, People’s Republic of China
    3 School of Automation and Electrical Engineering, Nanjing University of Technology, Nanjing 210009, People’s Republic of China
    4 China Electric Power Research Institute, Beijing 100192, People’s Republic of China
  • Online:2017-12-04 Published:2017-12-07
  • Supported by:

    This work was partly supported by National Natural Science Foundation of China under Grant No. 51477164, the National Basic Research Program of China under Grant No.2014CB239505-03, the State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources under Grant No. LAPS16013 and the Science and Technology Project of State Grid Corporation of China.

Abstract:

Nanosecond-pulse diffuse discharges could provide high-density plasma and high-energy electrons at atmospheric pressure. In this paper, the surface treatment of Cu by nanosecond-pulse diffuse discharges is conducted in atmospheric air. Factors influencing the water contact angle (WCA), chemical composition and microhardness, such as the gap spacing and treatment time, are investigated. The results show that after the plasma surface treatment, the WCA considerably decreases from 87° to 42.3°, and the surface energy increases from 20.46 mJ m−2 to 66.28 mJ m−2. Results of energy dispersive x-ray analysis show that the concentration of carbon decreases, but the concentrations of oxygen and nitrogen increase significantly. Moreover, the microhardness increases by approximately 30% after the plasma treatment. The aforementioned changes on the Cu surface indicate the plasma surface treatment enhances the hydrophilicity and microhardness, and it cleans the carbon and achieves oxidization on the Cu surface. Furthermore, by increasing the gap spacing and treatment time, better treatment effects can be obtained. The microhardness in the case of a 2.5 cm gap is higher than that in the case of a 3 cm gap. More oxygen and nitrogen species appear on the Cu surface for the 2.5 cm gap treatment than for the 3 cm gap treatment. TheWCA significantly decreases with the treatment time when it is no longer than 90 s, and then it reaches saturation. In addition, more oxygen-containing and nitrogen-containing groups appear after extended plasma treatment time. They contribute to the improvement of the hydrophilicity and oxidation on the Cu surface.

Key words: nanosecond pulse, diffuse discharge, surface treatment, copper, water contact angle, microhardness

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