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Plasma Sci. Technol. ›› 2018, Vol. 20 ›› Issue (12): 125503-125503.doi: 10.1088/2058-6272/aacda4

• 等离子体技术 • 上一篇    下一篇

Co-synthesis of vertical graphene nanosheets and high-value gases using inductively coupled plasma enhanced chemical vapor deposition

  

  • 收稿日期:2018-04-23 出版日期:2018-10-09 发布日期:2018-06-07

Co-synthesis of vertical graphene nanosheets and high-value gases using inductively coupled plasma enhanced chemical vapor deposition

Jian YANG (杨健)1, Ruiyang XU (许睿飏)1, Angjian WU (吴昂键)1,2,4, Xiaodong LI (李晓东)1,4, Li LI (李澧)1, Wangjun SHEN (沈望俊) 3 and Jianhua YAN (严建华)1   

  1. 1 State Key Laboratory of Clean Energy Utilization, Institute for Thermal Power Engineering, Zhejiang University, Hangzhou 310027, People’s Republic of China
    2 Department of Nuclear Engineering, University of California at Berkeley, Berkeley, California 94720, United States of America
    3 China United Engineering Corporation, Hangzhou 310052, People’s Republic of China
  • Received:2018-04-23 Online:2018-10-09 Published:2018-06-07
  • Supported by:

    This work was supported by National Natural Science Foundation of China (No. 51576174) and China Postdoctoral Science Foundation Funded Project (No. 2018M630672).

Abstract:

One-step controllable synthesis of vertical graphene nanosheets (VGs) and high-value gases was achieved using inductively coupled plasma enhanced chemical vapor deposition (ICPECVD). The basic physical properties of the ICPECVD process were revealed via electrical diagnosis and optical emission spectroscopy. The coil current and voltage increased linearly with the augmenting of injected power, and CH, C2, H2 and H were detected at a wavelength from 300 to 700 nm, implying the generation of abundant graphene-building species. The morphology and structure of solid carbon products, graphene nanosheets, were systemically characterized in terms of the variations of operating conditions, such as pressure, temperature, gas proportion, etc. The results indicated that an appropriate operating condition was indispensable for the growth process of graphene nanosheets. In the present work, the optimized result was achieved at the pressure, heating temperature, applied power and gas proportion of 600mTorr, 800 °C, 500 W and 20:20:15, respectively, and the augmenting of both CH4 and H2 concentrations had a positive effect on the etching of amorphous carbon. Additionally, H2 and C2 hydrocarbons were detected as the main exhaust gases. The selectivity of H2 and C2H2 , measured in exhaust gases, reached up to 52% and 8%, respectively, which implied a process of free radical reactions and electron collision dissociation. Based on a comprehensive investigation of spectral and electrical parameters and synthesized products, the reaction mechanism of collision, dissociation, diffusion, etc, in ICPECVD could be speculated, providing a probable guide for experimental and industrial applications.

Key words: vertical graphene nanosheets, gaseous products, OES, electrical diagnosis, ICPECVD

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