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Plasma Sci. Technol. ›› 2018, Vol. 20 ›› Issue (3): 035405.doi: 10.1088/2058-6272/aaa3d6

• Low Temperature Plasma • Previous Articles     Next Articles

Electron relaxation properties of Ar magnetron plasmas

Xinjing CAI (蔡新景)1, Xinxin WANG (王新新)2 and Xiaobing ZOU (邹晓兵)2   

  1. 1 Department of Electrical Engineering, Northeast Electric Power University, Jilin 132012, People’s Republic of China 2 State Key Laboratory of Control and Simulation of Power Systems and Generation Equipment, Tsinghua University, Beijing 100084, People’s Republic of China
  • Received:2017-10-09 Published:2017-12-21
  • Supported by:

    This work is supported by National Natural Science Foundation of China (grant No. 51677024).

Abstract:

An understanding of electron relaxation properties in plasmas is of importance in the application of magnetrons. An improved multi-term approximation of the Boltzmann equation is employed to study electron transport and relaxation properties in plasmas. Elastic, inelastic and nonconservative collisions between electrons and neutral particles are considered. The expressions for the transport coefficients are obtained using the expansion coefficients and the collision operator term. Numerical solutions of the matrix equations for the expansion coefficients are also investigated. Benchmark calculations of the Reid model are presented to demonstrate the accuracy of the improved multi-term approximation. It is shown that the two-term approximation is generally not accurate enough and the magnetic fields can reduce the anisotropy of the velocity distribution function. The electron relaxation properties of Ar plasmas in magnetrons for various magnetic fields are studied. It is demonstrated that the energy parameters change more slowly than the momentum parameters.

Key words: electron transport, electron relaxation, Boltzmann equation, multi-term approximation