Magnetic field enhanced radio frequency ion source and its application for Si-incorporation diamond-like carbon film preparation

Various ion sources are key components to prepare functional coatings, such as diamond-like carbon (DLC) films. In this article, we present our trying of surface modification on basis of Siincorporation diamond-like carbon (Si-DLC) produced by a magnetic field enhanced radio frequency ion source, which is established to get high density plasma with the help of magnetic field. Under proper deposition process, a contact angle of 111° hydrophobic surface was achieved without any surface patterning, where nanostructure SiC grains appeared within the amorphous microstructure. The surface property was influenced by ion flow parameters as well as the resultant surface microstructure. The magnetic field enhanced radio frequency ion source developed in this paper was useful for protective film applications.