Numerical simulation and experimental research on an inductively coupled RF plasma cathode

In this study, numerical simulation and discharge current tests were conducted on an inductively coupled radio frequency (RF) plasma cathode. Numerical simulations and experimental measurements were performed to study the factors influencing the electron extraction characteristics, including the gas type, gas flow, input power and extracting voltage. The simulation results were approximately consistent with the experimental results. We experimentally found that the RF input power mainly determines the extracted electron current. An electron current greater than 1 A was acquired at 270 W (RF input power), 2.766 sccm (xenon gas). Our results prove that an inductively coupled RF plasma cathode can be reasonable and feasible, particularly for low power electric propulsion devices.