Numerical simulation of nanosecond laser ablation and plasma characteristics considering a real gas equation of state

Qiang LIU (刘强); Qi MIN (敏琦); Maogen SU (苏茂根); Xingbang LIU (刘兴邦); Shiquan CAO (曹世权); Duixiong SUN (孙对兄); Chenzhong DONG (董晨钟); Yanbiao FU (符彦飙)

doi:10.1088/2058-6272/ac2815

Plasma Science and Technology > 2021 > 23(12): 125001. > DOI: 10.1088/2058-6272/ac2815

Qiang LIU (刘强), Qi MIN (敏琦), Maogen SU (苏茂根), Xingbang LIU (刘兴邦), Shiquan CAO (曹世权), Duixiong SUN (孙对兄), Chenzhong DONG (董晨钟), Yanbiao FU (符彦飙). Numerical simulation of nanosecond laser ablation and plasma characteristics considering a real gas equation of state[J]. Plasma Science and Technology, 2021, 23(12): 125001. DOI: 10.1088/2058-6272/ac2815

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Numerical simulation of nanosecond laser ablation and plasma characteristics considering a real gas equation of state

¹ Key Laboratory of Atomic and Molecular Physics and Functional Material of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, People's Republic of China
² Joint Laboratory of Atomic and Molecular Physics, Northwest Normal University and Institute of Modern Physics of Chinese Academy of Sciences, Lanzhou 730070, People's Republic of China

Funds: This work is supported by the National Key Research and Development Program of China (No. 2017YFA0402300), National Natural Science Foundation of China (Nos. 11904293, 12064040 and 11874051), the Science and technology project of Gansu Province (No. 20JR5RA530), the Young Teachers Scientific Research Ability Promotion Plan of Northwest Normal University (No. NWNU-LKQN-18-32), and the Funds for Innovative Fundamental Research Group Project of Gansu Province (No. 20JR5RA541).

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Received Date: May 08, 2021
Revised Date: September 14, 2021
Accepted Date: September 17, 2021

Graphical Abstract

Abstract

Abstract

Based on the governing equations which include the heat conduction equation in the target and the fluid equations of the vapor plasma, a two-dimensional axisymmetric model for ns-laser ablation considering the Knudsen layer and plasma shielding effect is developed. The equations of state of the plasma are described by a real gas approximation, which divides the internal energy into the thermal energy of atoms, ions and electrons, ionization energy and the excitation energy of atoms and ions. The dynamic evolution of the silicon target and plasma during laser ablation is studied by using this model, and the distributions of the temperature, plasma density, Mach number related to the evaporation/condensation of the target surface, laser transmissivity as well as internal energy of the plasma are given. It is found that the evolution of the target surface during laser ablation can be divided into three stages: (1) the target surface temperature increases continuously; (2) the sonic and subsonic evaporation; and (3) the subsonic condensation. The result of the internal energy distribution indicates that the ionization and excitation energy plays an important role in the internal energy of the plasma during laser ablation. This model is suitable for the case that the temperature of the target surface is lower than the critical temperature.
- ns-laser ablation,
- hydrodynamic model,
- Knudsen layer,
- equation of state

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References (32)

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