Ion Heating in an ECR Plasma with a Magnetic Mirror Field

SHEN Wulin (沈武林); MA Zhibin (马志斌); TAN Bisong (谭必松); WU Jun (吴俊)

doi:10.1088/1009-0630/15/6/06

Plasma Science and Technology > 2013 > 15(6): 516-520. > DOI: 10.1088/1009-0630/15/6/06

SHEN Wulin (沈武林), MA Zhibin (马志斌), TAN Bisong (谭必松), WU Jun (吴俊). Ion Heating in an ECR Plasma with a Magnetic Mirror Field[J]. Plasma Science and Technology, 2013, 15(6): 516-520. DOI: 10.1088/1009-0630/15/6/06

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Ion Heating in an ECR Plasma with a Magnetic Mirror Field

Provincial Key Laboratory of Plasma Chemistry and Advanced Materials, School of Mate- rials Science and Engineering, Wuhan Institute of Technology, Wuhan 430073, China

Funds: supported by National Natural Science Foundation of China (No. 10875093)

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Received Date: February 19, 2012

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Abstract

Abstract

Magnetoelectric heating was used to heat ions in an ECR plasma with a magnetic mirror field. The temperature and density of ions were measured by an ion sensitive probe (ISP) before and after magnetoelectric heating in order to investigate the influence of the anode ring's radius, axial position and working pressure on magnetoelectric heating. Results showed that a suitable radius of the anode ring could improve the ion temperature effectively and the optimal size of the anode ring depended on the cyclotron radius of ions. The radial uniformity of the ion density was improved by increasing the radius of the anode ring after heating. The magnetic mirror field could reduce the loss of ions caused by collision with the wall of the chamber and it was beneficial to increase the ion temperature and the ion density. It was suitable to heat the ions when the anode ring was set at the center of the magnetic mirror field where there was a weaker magnetic field strength. Lower pressure contributed to the increase in the ion temperature and efficiency of magnetoelectric heating.
- ECR plasma,
- magnetoelectric heating,
- ion temperature

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