Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate

LIN Zeng (蔺增); WANG Feng (王凤); GAO Ding (高丁); BA Dechun (巴德纯); LIU Chunming (刘春明)

doi:10.1088/1009-0630/15/7/16

Plasma Science and Technology > 2013 > 15(7): 690-695. > DOI: 10.1088/1009-0630/15/7/16

LIN Zeng (蔺增), WANG Feng (王凤), GAO Ding (高丁), BA Dechun (巴德纯), LIU Chunming (刘春明). Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate[J]. Plasma Science and Technology, 2013, 15(7): 690-695. DOI: 10.1088/1009-0630/15/7/16

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Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate

1 School of Mechanical Engineering & Automation, Northeastern University,Shenyang 110004, China 2 School of Materials & Metallurgy, Northeastern University, Shenyang 110004, China 3 Shenyang Aeroengine Research Institute, Shenyang 110015, China

Funds: supported by China Postdoctoral Science Foundation Funded Project (Nos. 20100481209 and 201104569), a Grant (20120101220) from Liaoning Province of China and a Grant (F11-264-1-74) from Shenyang City of China, in part supported by the Fundamental Research Funds for the Central Universities, China (No. N110403002)

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Received Date: December 13, 2011

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Abstract

Abstract

In this work, diamond-like-carbon (DLC) films were deposited onto polycarbonate (PC) substrates by radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD), and silicon films were prepared between DLC and PC substrates by magnetron sputtering deposition so as to improve the adhesion of the DLC films. The deposited films were investigated by means of field-emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Subsequently, the following frictional and optical properties of the films were measured: the friction coefficient by using a ball-on-disk tribometer, the scratch hardness by using a nano-indenter, the optical transmittance by using a UV/visible spectrometer. The effects of incident power upon the frictional and optical properties of the films were investigated. Films deposited at low incident powers showed large optical gaps, which decreased with increasing incident power. The optical properties of DLC films correlated to the sp² content of the coatings. High anti-scratch properties were obtained at higher values of incident power. The anti-scratch properties of DLC films correlated to the sp³ content of the coatings.
- diamond-like-carbon films,
- PECVD,
- microstructure frictional and optical properties

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