The Gas Nucleation Process Study of Anatase TiO 2 in Atmospheric Non-Thermal Plasma Enhanced Chemical Vapor Deposition

WU Maoshui(吴茂水); XU Yu(徐雨); DAI Linjun(戴林君); WANG Tiantian(王恬恬); LI Xue(李雪); WANG Dexin(王德信); GUO Ying(郭颖); DING Ke(丁可); HUANG Xiaojiang(黄晓江); SHI Jianjun(石建军); ZHANG Jing(张菁)

doi:10.1088/1009-0630/16/1/07

Plasma Science and Technology > 2014 > 16(1): 32-36. > DOI: 10.1088/1009-0630/16/1/07

WU Maoshui(吴茂水), XU Yu(徐雨), DAI Linjun(戴林君), WANG Tiantian(王恬恬), LI Xue(李雪), WANG Dexin(王德信), GUO Ying(郭颖), DING Ke(丁可), HUANG Xiaojiang(黄晓江), SHI Jianjun(石建军), ZHANG Jing(张菁). The Gas Nucleation Process Study of Anatase TiO 2 in Atmospheric Non-Thermal Plasma Enhanced Chemical Vapor Deposition[J]. Plasma Science and Technology, 2014, 16(1): 32-36. DOI: 10.1088/1009-0630/16/1/07

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The Gas Nucleation Process Study of Anatase TiO 2 in Atmospheric Non-Thermal Plasma Enhanced Chemical Vapor Deposition

1 Department of Applied Physics, Donghua University, Shanghai 201620, China 2 College of Material Science, Donghua University, Shanghai 201620, China 3 Member of Magnetic Confinement Fusion Research Center, Ministry of Education, Donghua University, Shanghai 201620, China

Funds: supported by National Natural Science Foundation of China (Nos.10835004, 10775031 and 11375042), Shanghai Municipal Com- mittee of Science and Technology of China (10XD1400100), Outstanding Young Investigator Award (No.11005017)

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Received Date: August 29, 2013

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Abstract

Abstract

The gas phase nucleation process of anatase TiO ₂ in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope (FESEM), X-ray diffraction (XRD), high resolution transmission electron microscopy (HRTEM) and selected area electron diffraction (SAED). The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmo- spheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO ₂ film.

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