Properties of Plasma Enhanced Chemical Vapor Deposition Barrier Coatings and Encapsulated Polymer Solar Cells

QI Lei(齐磊); ZHANG Chunmei(张春梅); CHEN Qiang(陈强)

doi:10.1088/1009-0630/16/1/10

Plasma Science and Technology > 2014 > 16(1): 45-49. > DOI: 10.1088/1009-0630/16/1/10

QI Lei(齐磊), ZHANG Chunmei(张春梅), CHEN Qiang(陈强). Properties of Plasma Enhanced Chemical Vapor Deposition Barrier Coatings and Encapsulated Polymer Solar Cells[J]. Plasma Science and Technology, 2014, 16(1): 45-49. DOI: 10.1088/1009-0630/16/1/10

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Properties of Plasma Enhanced Chemical Vapor Deposition Barrier Coatings and Encapsulated Polymer Solar Cells

Laboratory of Plasma Physics and Material, Beijing Institute of Graphic Communication, Beijing 102600, China

Funds: supported by National Natural Science Foundation of China (No.11175024), Beijing Natural Science Foundation (No.1112012), and 2011BAD24B01, KM 201110015008, KM 201010015005, BIGC Key Project (No.23190113051) and PHR20110516, PHR201107145, Fujian Provincial Department of Science and Technology Key Project of China (No.2012H0008)

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Received Date: August 20, 2013

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Abstract

Abstract

In this paper, we report silicon oxide coatings deposited by plasma enhanced chem- ical vapor deposition technology (PECVD) on 125 µm polyethyleneterephthalate (PET) surfaces for the purpose of the shelf lifetime extension of sealed polymer solar cells. After optimiza- tion of the processing parameters, we achieved a water vapor transmission rate (WVTR) of ca. 10 ⁻³ g/m ² /day with the oxygen transmission rate (OTR) less than 0.05 cc/m² /day, and succeeded in extending the shelf lifetime to about 400 h in encapsulated solar cells. And then the chemical structure of coatings related to the properties of encapsulated cell was investigated in detail.
- PECVD,
- polymer solar cells,
- encapsulation,
- SiO _x

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References (13)

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