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Seon-Geun OH, Young-Jun LEE, Jae-Hong JEON, Jong-Hyeon SEO, Hee-Hwan CHOE. The Spatial Effects of Antenna Configuration in a Large Area Inductively Coupled Plasma System for Flat Panel Displays[J]. Plasma Science and Technology, 2014, 16(8): 758-766. DOI: 10.1088/1009-0630/16/8/06
Citation: Seon-Geun OH, Young-Jun LEE, Jae-Hong JEON, Jong-Hyeon SEO, Hee-Hwan CHOE. The Spatial Effects of Antenna Configuration in a Large Area Inductively Coupled Plasma System for Flat Panel Displays[J]. Plasma Science and Technology, 2014, 16(8): 758-766. DOI: 10.1088/1009-0630/16/8/06

The Spatial Effects of Antenna Configuration in a Large Area Inductively Coupled Plasma System for Flat Panel Displays

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  • Received Date: September 02, 2013
  • Spatial distributions of plasma parameters such as electron density, electron temperature and electric potential were investigated using a commercial simulation software (COMSOL TM ) to predict the effects of antenna configuration in a large area inductively cou- pled plasma (ICP) system for flat panel displays. Nine planar antenna sets were evenly placed above a ceramic window. While the electron density was influenced by both the input current and gas pressure, the electron temperature and electric potential were dominantly affected by the gas pressure.
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