Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas

WANG Zhan (王战); GAO Wei (高巍); ZHANG Peng (张彭); YAN Huijie (闫慧杰); REN Chunsheng (任春生)

doi:10.1088/1009-0630/17/3/04

Plasma Science and Technology > 2015 > 17(3): 191-195. > DOI: 10.1088/1009-0630/17/3/04

WANG Zhan (王战), GAO Wei (高巍), ZHANG Peng (张彭), YAN Huijie (闫慧杰), REN Chunsheng (任春生). Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas[J]. Plasma Science and Technology, 2015, 17(3): 191-195. DOI: 10.1088/1009-0630/17/3/04

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Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas

1 AVIC Shenyang Aircraft Design & Research Institute, Shenyang 110035, China 2 School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

Funds: supported by National Natural Science Foundation of China (No. 11475038)

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Abstract

Abstract

In this paper, the double-discharge plasma generated by radio frequency (RF) and direct current (DC) has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.
- ICP,
- DC discharge,
- Langmuir probe,
- plasma characteristic

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