Citation: | WU Zhonghang (吴忠航), LIANG Rongqing (梁荣庆), Masaaki NAGATSU (永津雅章), CHANG Xijiang (昌锡江). The Characteristics of Columniform Surface Wave Plasma Excited Around a Quartz Rod by 2.45 GHz Microwaves[J]. Plasma Science and Technology, 2016, 18(10): 987-991. DOI: 10.1088/1009-0630/18/10/04 |
1 Moisan M, Beaudry C and Leprince P. 1975, IEEE Trans. Plasma Sci., PS-3: 55 2 Tuda M and Ono K. 1998, J. Vac. Sci. Technol. A, 16:2832 3 Tuda M, Ono K, Ootera H, et al. 2000, J. Vac. Sci.Technol. A, 18: 840 4 Kousaka H and Ono K. 2002, Jpn. J. Appl. Phys., 41:2199 5 Kousaka H and Ono K. 2003, Plasma Sources Sci.Technol., 12: 273 6 Yeh Y S, Iriyama Y, Matsuzawa Y, et al. 1988, J.Biomed. Mater. Res., 22: 795 7 Komachi K and Kobayashi S. 1989, J. Microwave Power Electromag. Energ., 25: 236 8 Werner F, Korzec D and Engemann J. 1994, Plasma Sources Sci. Technol., 3: 473 9 Odrobina I, Kúdela J and Kando M. 1998, Plasma Sources Sci. Technol., 7: 238 10 Nagatsu M, Xu G, Yamage M, et al. 1996, Jpn. J.Appl. Phys., 35: L341 11 Nagatsu M, Ito A, Toyoda N, et al. 1999, Jpn. J. Appl.Phys., 38: L679 12 Nagatsu M, Sano T, Takada N, et al. 2000, Jpn. J.Appl. Phys., 39: L929 13 Chang X, Kunii K, Liang R, et al. 2013, Plasma Sources Sci. Technol., 22: 1011 14 Kousaka H, Umehara N, Ono K, et al. 2005, Jpn. J.Appl. Phys., 44: L1154 15 Xu J, Fan H, Kousaka H, et al. 2007, Diam. Rel.Mater., 16: 161 16 Kousaka H and Umehara N. 2006, Vacuum, 80: 806 17 Xu J, Kousaka H, Umehara N, et al. 2006, Surf. Coat.Technol., 201: 408 18 Nie Z F, Liu F, Zhou Q H, et al. 2009, EPL, 86: 35001 19 Wu Z H, Chang X J, He L, et al. 2012, EPL, 100:25001 20 Libermann M A and Lichtenberg A J. 1994, Principles of Plasma Discharges and Materials Processing. Wiley,New York, p.443
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