Decomposition of Potent Greenhouse Gases SF₆, CF₄ and SF₅CF₃ by Dielectric Barrier Discharge

For their distinguished global warming potential (GWP100) and long atmosphere lifespan, CF₄, SF₆ and SF₅CF₃ were significant in the field of greenhouse gas research. The details of discharging character and the optimal parameter were discussed by using a Dielectric Barrier Discharge (DBD) reactor to decompose these potent greenhouse gases in this work. The results showed that SF6 could be decomposed by 92% under the conditions of 5 min resident time and 3000 V applied voltage with the partial pressure of 2.0 kPa, 28.2 kPa, and 1.8 kPa for SF₆, air and water vapor, respectively. 0.4 kPa CF₄ could be decomposed by 98.2% for 4 min resident time with 30 kPa Ar added. The decomposition of SF5CF3 was much more effective than that of SF₆ and CF4 and moreover, 1.3 kPa SF₅CF₃, discharged with 30 kPa O₂, Ar and air, could not be detected when the resident time was 80 s, 40 s, and 120 s, respectively. All the results indicated that DBD was a feasible technique for the abatement of potent greenhouse gases.