Optical properties of titanium oxide films obtained by cathodic arc plasma deposition

Vukoman JOKANOVIC; Bozana COLOVIC; Anka TRAJKOVSKA PETKOSKA; Ana MRAKOVIC; Bojan JOKANOVIC; Milos NENADOVIC; Manuela FERRARA; Ilija NASOV

doi:10.1088/2058-6272/aa8806

Plasma Science and Technology > 2017 > 19(12): 125504. > DOI: 10.1088/2058-6272/aa8806

Vukoman JOKANOVIC, Bozana COLOVIC, Anka TRAJKOVSKA PETKOSKA, Ana MRAKOVIC, Bojan JOKANOVIC, Milos NENADOVIC, Manuela FERRARA, Ilija NASOV. Optical properties of titanium oxide films obtained by cathodic arc plasma deposition[J]. Plasma Science and Technology, 2017, 19(12): 125504. DOI: 10.1088/2058-6272/aa8806

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Optical properties of titanium oxide films obtained by cathodic arc plasma deposition

1 Vinc a Institute of Nuclear Sciences, University of Belgrade, Mike Petrovic a Alasa 12-14, 11001 Belgrade, Serbia 2 ALBOS Doo, Orahovac ka 19, 11000 Belgrade, Serbia 3 University St Kliment Ohridski, Faculty of Technology and Technical Sciences, Veles, R. Macedonia 4 GL group, Werner-von-Siemens-Straβe, 86405 Metingen, Germany 5 TE-STT-SCIS, Laboratorio Sviluppo Componenti ed Impianti Solari, Piazzale Enrico Fermi 1, 80055 Portici (NA), Italia 6 Plasma Doo, 29 November 66/9, 1000 Skopje, R. Macedonia

Funds: Financial support for this work was provided by the Ministry of Education, Science and Technological Development of the Republic of Serbia (grant 172026) and COST action MP1306.

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Received Date: July 05, 2017

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Abstract

Structural and optical properties of nanometric titanium oxide (Ti_xO_y) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fourier-transform infrared spectroscopy showed the presence of anatase, rutile, Ti₂O₃,Ti₄O₇ and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and 50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet–visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined.
- optical materials,
- plasma deposition,
- thin films,
- ellipsometry

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