A method of laser focusing control in micro-laser-induced breakdown spectroscopy

Wei WANG (汪为); Lanxiang SUN (孙兰香); Peng ZHANG (张鹏); Liming ZHENG (郑黎明); Lifeng QI (齐立峰); Wei DONG (董伟)

doi:10.1088/2058-6272/aae383

Plasma Science and Technology > 2019 > 21(3): 34004-034004. > DOI: 10.1088/2058-6272/aae383

Wei WANG (汪为), Lanxiang SUN (孙兰香), Peng ZHANG (张鹏), Liming ZHENG (郑黎明), Lifeng QI (齐立峰), Wei DONG (董伟). A method of laser focusing control in micro-laser-induced breakdown spectroscopy[J]. Plasma Science and Technology, 2019, 21(3): 34004-034004. DOI: 10.1088/2058-6272/aae383

Citation:

PDF (1472 KB)

A method of laser focusing control in micro-laser-induced breakdown spectroscopy

¹ Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, People’s Republic of China
² Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, People’s Republic of China
³ University of Chinese Academy of Sciences, Beijing 100049, People’s Republic of China
⁴ Key Laboratory of Networked Control System, Chinese Academy of Sciences, Shenyang 110016, People’s Republic of China

Funds: This work was supported by the National Key Research and Development Program of China (Grant No. 2017YFF0106202), National Natural Science Foundation of China (Grant No. 61473279), the Key Research Program of Frontier Sciences, CAS (Grant No. QYZDJ-SSW-JSC037) and the Youth Inno-vation Promotion Association, CAS.

More Information

Received Date: July 30, 2018

Graphical Abstract

Abstract

Abstract

This paper presents a method for the automatic adjustment of the laser defocusing amount in micro-laser-induced breakdown spectroscopy. A microscopic optical imaging system consisting of a CCD camera and a 20× objective lens was adopted to realize the method. The real-time auto-focusing of the system was achieved by detecting the effective pixels of the light spot generated by the laser pointer. The focusing accuracy of the method could achieve 3 μm. The element concentrations of Mn and Ni in low-alloy steels were analyzed at a crater diameter of about 35 μm using the presented method. After using the presented method, the determination coefficients of Mn and Ni both exceeded 0.997, with the root-mean-square errors being 0.0133 and 0.0395, respectively. Scanning analysis was performed on the inclined plane and the curved surface by means of focusing control and non-focusing control. Ten characteristic spectral lines of Fe were selected as the analysis lines. With the focusing control, the average relative standard deviations obtained on the inclined plane and curved surface were both less than 5%, and much less than the values without focusing control, 14.6% and 40.39%.
- LIBS,
- microanalysis,
- ablation crater,
- focusing control

FullText(HTML)

References (26)

References

[1]	Rieger G W et al 2002 Appl. Spectrosc. 56 689
[2]	Freedman A, Iannarilli F J Jr and Wormhoudt J C 2005 Spectrochim. Acta B 60 1076
[3]	Cristoforetti G et al 2006 J. Anal. At. Spectrom. 21 697
[4]	Wang X Z et al 2017 Spectrosc. Spect. Anal. 37 1254 (in Chinese)
[5]	Liu J et al 2015 Plasma Sci. Technol. 17 644
[6]	Wang F J et al 2017 Spectrosc Spec. Anal. 37 236 (in Chinese)
[7]	Afgan M S, Hou Z Y and Wang Z 2017 J. Anal. At. Spectrom. 32 1905
[8]	Godwal Y et al 2008 Opt. Express 16 12435
[9]	Menut D et al 2003 Appl. Opt. 30 6063
[10]	Bette H and Noll R 2004 J. Phys. D Appl. Phys. 37 1281
[11]	Wessel W et al 2010 Eng. Fract. Mech. 77 1874
[12]	Liu X N et al 2015 Plasma Sci. Technol. 17 904
[13]	Vadillo J M et al 1996 Fresenius J. Anal. Chem. 355 909
[14]	Fabre C and Lathuiliere B 2007 Spectrochim. Acta B 62 1537
[15]	Yang C et al 2015 Plasma Sci. Technol. 17 671
[16]	Ashrafkhani B, Bahreini M and Tavassoli S H 2015 Opt. Spectrosc. 118 841
[17]	Han Z Y et al 2015 Spectrosc. Spect. Anal. 35 304 (in Chinese)
[18]	Zhang S et al 2018 Front. Phys. 13 135201
[19]	Godwal Y et al 2008 Laser Part. Beams 26 95
[20]	Lu Y et al 2013 J. Anal. At. Spectrom. 28 743
[21]	Gornushkin I B et al 2004 Appl. Spectrosc. 58 762
[22]	Hwang D J et al 2007 Appl. Phys. Lett. 91 251118
[23]	Li Y D et al 2016 Spectrosc. Spect. Anal. 36 2238 (in Chinese)
[24]	Motto-Ros V et al 2014 Spectrochim. Acta B 92 60
[25]	Golik S S et al 2015 Plasma Sci. Technol. 17 975
[26]	Wang Z et al 2011 J. Anal. At. Spectrom. 26 2289