Advanced Search+
S J KIM, J J LEE, Y S LEE, J H KIM, S J YOU. Computational study on influence of RF shielding box on inductance of coil[J]. Plasma Science and Technology, 2019, 21(6): 64004-064004. DOI: 10.1088/2058-6272/ab0d42
Citation: S J KIM, J J LEE, Y S LEE, J H KIM, S J YOU. Computational study on influence of RF shielding box on inductance of coil[J]. Plasma Science and Technology, 2019, 21(6): 64004-064004. DOI: 10.1088/2058-6272/ab0d42

Computational study on influence of RF shielding box on inductance of coil

  • Despite the fact that a radio frequency (RF) shielding box affects a coil inductance used in matching network, RF engineers have used a coil inductance measured in open space on designing matching networks since it is difficult to precisely measure the coil inductance within the RF shielding box. In this work, we investigate the influences of the RF shielding box on the coil inductance via a 3D full electromagnetic wave simulation. Simulation results shows that the coil inductance decreases from -6.0% to -11.9% compared with its ideal inductance depending on coil positions within the RF shielding box. Both inductive and capacitive coupling between the coil and surfaces of the RF shielding box contribute to the reduction of the coil inductance. We expect that these results would be useful for those who design RF matching networks.
  • loading

Catalog

    Turn off MathJax
    Article Contents

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return