Computational study on influence of RF shielding box on inductance of coil

S J KIM; J J LEE; Y S LEE; J H KIM; S J YOU

doi:10.1088/2058-6272/ab0d42

Plasma Science and Technology > 2019 > 21(6): 64004-064004. > DOI: 10.1088/2058-6272/ab0d42

S J KIM, J J LEE, Y S LEE, J H KIM, S J YOU. Computational study on influence of RF shielding box on inductance of coil[J]. Plasma Science and Technology, 2019, 21(6): 64004-064004. DOI: 10.1088/2058-6272/ab0d42

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Computational study on influence of RF shielding box on inductance of coil

¹ Applied Physics lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of Korea
² Korea Research Institute of Standards and Science (KRISS), Daejeon 34113, Republic of Korea

Funds: This research was supported by the MOTIE (Ministry of Trade, Industry & Energy (10052890 Numerical simulation to overcome process limitations below 10 nm semiconductor, 10053098 Plasma enhanced atomic-layer-deposition process and alternatives for gate spacer and multipatterning technology) and KSRC (Korea Semiconductor Research Consortium) supported program for the development of the future semiconductor device, by the Ministry of Science, ICT and Future Planning (NRF-2017M1A7A1A02016321, NRF-2017R1D1A1A02018310), by the Korea Research Institute of Standards and Science (KRISS—2018—GP2018-0012), by the National Research Council of Science & Technology (NST) granted by the Korea government (MSIP) (No. CAP-17-02-NFRI), and by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) and the Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea (No. 20172010105910)

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Received Date: September 30, 2018

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Abstract

Despite the fact that a radio frequency (RF) shielding box affects a coil inductance used in matching network, RF engineers have used a coil inductance measured in open space on designing matching networks since it is difficult to precisely measure the coil inductance within the RF shielding box. In this work, we investigate the influences of the RF shielding box on the coil inductance via a 3D full electromagnetic wave simulation. Simulation results shows that the coil inductance decreases from -6.0% to -11.9% compared with its ideal inductance depending on coil positions within the RF shielding box. Both inductive and capacitive coupling between the coil and surfaces of the RF shielding box contribute to the reduction of the coil inductance. We expect that these results would be useful for those who design RF matching networks.
- 3D full EM wave simulation,
- RF matching component,
- RF shield,
- inductive and capacitive coupling

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References

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Computational study on influence of RF shielding box on inductance of coil

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