Effect of methane content and the oscillating electric field between electrodes on atmospheric Ar/methane plasma jet and DLC coating deposition

Reza SAFARI; Farshad SOHBATZADEH

doi:10.1088/2058-6272/ab8550

Plasma Science and Technology > 2020 > 22(8): 85401-085401. > DOI: 10.1088/2058-6272/ab8550

Reza SAFARI, Farshad SOHBATZADEH. Effect of methane content and the oscillating electric field between electrodes on atmospheric Ar/methane plasma jet and DLC coating deposition[J]. Plasma Science and Technology, 2020, 22(8): 85401-085401. DOI: 10.1088/2058-6272/ab8550

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Effect of methane content and the oscillating electric field between electrodes on atmospheric Ar/methane plasma jet and DLC coating deposition

Department of Atomic and Molecular Physics, Faculty of Basic Sciences, University of Mazandaran, Babolsar 47416, Iran

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Received Date: January 05, 2020
Revised Date: March 24, 2020
Accepted Date: March 30, 2020

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Abstract

Abstract

In this work, the effects of the methane gas flow and the internal oscillating electric field between electrodes on radio-frequency (RF) atmospheric pressure argon/methane plasma jet and process of diamond-like carbon (DLC) film deposition have been investigated. Properties of RF atmospheric Ar/methane plasma jet such as active species density, length, electron temperature, appearance and ionization process of argon/methane plasma jet are changed due to the changing of methane flow content and electric field vector and its gradient. With increasing methane flow, the formation of C₂ hydrocarbon and CH band content is decreased because injected electrical energy to a mixture of Ar/methane gases is insufficient to stabilize the ionization process of methane gas and the electrical-chemical reaction rate is decreased. With shortening the gas gap between two electrodes, electric field strength and its gradient are increased leading to more energy injection to the electron. Electrical-chemical reactions are strengthened leading to increasing the CH band content. These phenomena introduce the Ar/methane plasma jet in different modes causing to deposit the DLC film with different structures and properties. With using quartz glass and alumina ceramic as dielectric barriers tubes, RF atmospheric pressure Ar/ methane plasma jet has been used to deposit DLC coating in different modes. Increasing methane content and shortening the gas gap leads to decreasing sp³ bonded content and the quality of the deposited film.
- RF atmospheric plasma,
- methane flow,
- electric field

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References (44)

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