Power absorption, plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field

Elena KRALKINA; Konstantin VAVILIN; Ilya ZADIRIEV; Alexander NIKONOV

doi:10.1088/2058-6272/abb0dc

Plasma Science and Technology > 2020 > 22(11): 115404. > DOI: 10.1088/2058-6272/abb0dc

Elena KRALKINA, Konstantin VAVILIN, Ilya ZADIRIEV, Alexander NIKONOV. Power absorption, plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field[J]. Plasma Science and Technology, 2020, 22(11): 115404. DOI: 10.1088/2058-6272/abb0dc

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Power absorption, plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field

Physical Electronics Department, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia

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Received Date: May 30, 2020
Revised Date: August 17, 2020
Accepted Date: August 18, 2020

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Abstract

Abstract

The efficiency of radio-frequency (RF) power absorption, RF magnetic field structure and plasma parameters were measured in cylindrical inductive RF plasma sources 20 cm in diameter and 22, 32, 53 cm in length with a low value external magnetic field. The experiments were carried out in argon at pressures of 13–140 mPa. The RF power supply changed from 200 W to 800 W. The spiral antenna was used for sustaining the discharge. It was shown that efficiency of RF power absorption depended nonlinearly on the external magnetic field values. At maximal values of the RF power absorption efficiency, the axial distributions of longitudinal B_z and azimuthal B components of RF magnetic field manifested the formation of the partially standing wave with a half wavelength close to 8 cm. At the same conditions, the axial dependence of the radial RF magnetic field component B_r differed drastically. It was concluded that the B_z and B amplitudes were largely determined by the RF field of Trivelpiece-Gould wave, while B_r amplitude represented the radial RF field of the helicon wave.
- radio-frequency,
- plasma, helicon,
- Trivelpiece-Gould waves,
- inductive discharge

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References (47)

References

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Power absorption, plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field