Study of the 6.<i>x</i> nm short wavelength radiation spectra of laser-produced erbium plasmas for BEUV lithography

Tao WU; Qian WANG; Liuan CHEN; Peixiang LU

doi:10.1088/2058-6272/acafc1

Plasma Science and Technology > 2023 > 25(6): 065501. > DOI: 10.1088/2058-6272/acafc1

Tao WU, Qian WANG, Liuan CHEN, Peixiang LU. Study of the 6.x nm short wavelength radiation spectra of laser-produced erbium plasmas for BEUV lithography[J]. Plasma Science and Technology, 2023, 25(6): 065501. DOI: 10.1088/2058-6272/acafc1

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Study of the 6.x nm short wavelength radiation spectra of laser-produced erbium plasmas for BEUV lithography

1.
Hubei Key Laboratory of Optical Information and Pattern Recognition, School of Optical Information and Energy Engineering, Wuhan Institute of Technology, Wuhan 430205, People's Republic of China
2.
Guangdong Intelligent Robotics Institute, Dongguan 523808, People's Republic of China

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Received Date: August 25, 2022
Revised Date: December 27, 2022
Accepted Date: January 02, 2023
Available Online: December 05, 2023
Published Date: February 27, 2023

Graphical Abstract

Abstract

Abstract

Beyond extreme ultraviolet (BEUV) radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices. In this work, the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd: YAG laser-produced Er plasmas. The spectral contributions from the 4p–4d and 4d–4f transitions of singly, doubly and triply excited states of Er ⅩⅩⅣ–Er ⅩⅩⅫ in the BEUV band were calculated using Cowan and the Flexible Atomic Code. It was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x nm. Under the assumption of collisional radiative equilibrium of the laser-produced Er plasmas, the relative ion abundance in the experiment was inferred. Using the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays (UTAs), the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental spectrum. The spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.
- laser-produced plasmas,
- unresolved transition array,
- collisional radiative equilibrium

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Acknowledgments

The authors acknowledge the support from Guangdong Major Project of Basic and Applied Basic Research (No. 2019B030302003).

References (49)

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