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[3] | A F POPOVICH, V G RALCHENKO, V K BALLA, A K MALLIK, A A KHOMICH, A P BOLSHAKOV, D N SOVYK, E E ASHKINAZI, V Yu YUROV. Growth of 4″ diameter polycrystalline diamond wafers with high thermal conductivity by 915 MHz microwave plasma chemical vapor deposition[J]. Plasma Science and Technology, 2017, 19(3): 35503-035503. DOI: 10.1088/2058-6272/19/3/035503 |
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