Advanced Search+
TAN Bisong, MA Zhibin, SHEN Wulin, WU Zhenhui, CAO Hong, WANG Jianhua. Measurement of Ion Parameters by Ion Sensitive Probe in ECR Plasma[J]. Plasma Science and Technology, 2011, 13(1): 68-72.
Citation: TAN Bisong, MA Zhibin, SHEN Wulin, WU Zhenhui, CAO Hong, WANG Jianhua. Measurement of Ion Parameters by Ion Sensitive Probe in ECR Plasma[J]. Plasma Science and Technology, 2011, 13(1): 68-72.

Measurement of Ion Parameters by Ion Sensitive Probe in ECR Plasma

Funds: Supported by National Natural Science Foundation of China ( No.10875093)
More Information
  • Ion parameters in electron cyclotron resonance (ECR) microwave plasma were measured by ion sensitive probe and were compared with the electron parameters obtained by double Langmuir probe. The effects of gas pressure and microwave power on the ion temperature and density were analyzed. The spatial distribution of the ion parameters was also investigated by the ion sensitive probes with a tunable radial depth installed on different probe windows along the chamber axis. Results showed that the ion density measured by the ion sensitive probe was in good agreement with the electron density measured by the double Langmuir probe. The influence of gas pressure on the ion parameters was stronger than that of microwave power. With the increase in working pressure, the ion temperature decreased monotonously with a decreasing rate larger than that at higher pressure. The ion density first increased to a peak (42.3?1010cm-3) at 1 Pa and then decreased. The ion temperature and density increased little with the increase in the microwave power from 400 W to 800 W. The plasma far away from the resonant point is found to be radially uniform.
  • Related Articles

    [1]Juan YANG (杨涓), Yuliang FU (付瑜亮), Xianchuang LIU (刘宪闯), Haibo MENG (孟海波), Yizhou JIN (金逸舟). Bended probe diagnostics of the plasma characteristics within an ECR ion source with a rectangular waveguide[J]. Plasma Science and Technology, 2018, 20(8): 85402-085402. DOI: 10.1088/2058-6272/aabb9f
    [2]Yue HUA (滑跃), Jian SONG (宋健), Zeyu HAO (郝泽宇), Gailing ZHANG (张改玲), Chunsheng REN (任春生). Effects of direct current discharge on the spatial distribution of cylindrical inductivelycoupled plasma at different gas pressures[J]. Plasma Science and Technology, 2018, 20(1): 14005-014005. DOI: 10.1088/2058-6272/aa8ea8
    [3]BAI Yujing (白玉静), LI Jianquan (李建泉), XU Jun (徐军), LU Wenqi (陆文琪), WANG Younian (王友年), DING Wanyu (丁万昱 ). Improvement of the Harmonic Technique of Probe for Measurements of Electron Temperature and Ion Density[J]. Plasma Science and Technology, 2016, 18(1): 58-61. DOI: 10.1088/1009-0630/18/1/10
    [4]MA Zhibin (马志斌), WU Jun (吴俊), TAN Bisong (谭必松), SHEN Wulin (沈武林), PAN Xin (潘鑫), WANG Jianhua (汪建华). Influence of Working Pressure on Ion Sensitive Probe Measurement in Microwave ECR Plasmas[J]. Plasma Science and Technology, 2015, 17(4): 294-297. DOI: 10.1088/1009-0630/17/4/06
    [5]Djelloul MENDIL, Hadj LAHMAR, Laifa BOUFENDI. Spatial Evolution Study of EEDFs and Plasma Parameters in RF Stochastic Regime by Langmuir Probe[J]. Plasma Science and Technology, 2014, 16(9): 837-842. DOI: 10.1088/1009-0630/16/9/06
    [6]XU Xiufeng (徐修峰), LI Shiping (李世平), CAO Hongrui (曹宏睿), XIAO Rui (肖锐), et al.. A Simulation Study on the Flash X-Ray Spectra Spatial Distribution[J]. Plasma Science and Technology, 2013, 15(11): 1165-1168. DOI: 10.1088/1009-0630/15/11/16
    [7]SHEN Wulin (沈武林), MA Zhibin (马志斌), TAN Bisong (谭必松), WU Jun (吴俊). Ion Heating in an ECR Plasma with a Magnetic Mirror Field[J]. Plasma Science and Technology, 2013, 15(6): 516-520. DOI: 10.1088/1009-0630/15/6/06
    [8]LU Wenqi (陆文琪), JIANG Xiangzhan (蒋相站), LIU Yongxin (刘永新), YANG Shuo (杨烁), et al. Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas[J]. Plasma Science and Technology, 2013, 15(6): 511-515. DOI: 10.1088/1009-0630/15/6/05
    [9]CHEN Lei, MA Mingwang, Li Ming, JIN Dazhi, TAN Xiaohua, DAI Jingyi, YANG Lin, HU Side. Radial and Angular Resolved Langmuir Probe Diagnosis of a Pulsed Vacuum Arc Plasma[J]. Plasma Science and Technology, 2011, 13(6): 689-692.
    [10]Naohiro KASUYA, Seiya NISHIMURA, Masatoshi YAGI, Kimitaka ITOH, Sanae-I ITOH. Heavy Ion Beam Probe Measurement in Turbulence Diagnostic Simulator[J]. Plasma Science and Technology, 2011, 13(3): 326-331.

Catalog

    Article views (905) PDF downloads (353) Cited by()

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return