Measurement of the O2 Dissociation Fraction in RF Low Pressure O2/Ar Plasma Using Optical Emission Spectrometry

Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.