摘要: Microhollow cathode discharge (MHCD) plasmas were generated in gas mixtures containing water vapor at pressures of up to 100 kPa of He or 20 kPa of air. The cathode diameter was 1.0 mm with a length of 2.0 mm. The electrical characteristics showed an abnormal glow mode. Spectroscopic measurements were carried out to examine the plasma and radicals. An analysis of the spectral profile of Hα at 656.3 nm enabled a derivation of the electron densities, namely 2x10¹⁴ cm^-3 (at 10 kPa) and 6x10¹⁴ cm^-3 (at 4 kPa) for the helium and air atmospheres, respectively, in the negative glow region. By comparing the observed OH radical spectra with those calculated by the simulation code LIFBASE, the gas temperature was deduced to be 900 K for 4 kPa of He at a discharge current of 50 mA.