Abstract: A 16 kV/20 A power supply was developed for the extraction grid of prototype radio frequency (RF) ion source of neutral beam injector. To acquire the state signals of extraction grid power supply (EGPS) and control the operation of the EGPS, a data acquisition and control system has been developed. This system mainly consists of interlock protection circuit board, photoelectric conversion circuit, optical fibers, industrial compact peripheral component interconnect (CPCI) computer and host computer. The human machine interface of host computer delivers commands and data to program of the CPCI computer, as well as offers a convenient client for setting parameters and displaying EGPS status. The CPCI computer acquires the status of the power supply. The system can turn-off the EGPS quickly when the faults of EGPS occur. The system has been applied to the EGPS of prototype RF ion source. Test results show that the data acquisition and control system for the EGPS can meet the requirements of the operation of prototype RF ion source.