Abstract: The surface trap parameter can significantly affect the development of surface flashover in vacuum, but the effective mode and mechanism are not very clear yet. The trap parameters of three polymeric materials were tested and calculated by means of isothermal surface potential decay. The flashover experiment was developed under different applied voltages. The results show a positive correlation between the withstand voltage and the deep trap, i.e., the deeper trap energy level is, the higher flashover voltage is. The dynamics process of charge trapping and detrapping was analyzed based on the charge transport model in dielectrics with a single trap level and two discrete trap levels. The time of charge trapping was compared with that of the discharge development. The results show that the charge trapping time is longer than the flashover development time. The way to influence flashover for a trap is not to decrease the secondary electrons in single discharge development, but to change the electric field distribution on the dielectric surface by charge capture.