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Ar双频CCP放电的二维混杂模拟及与实验比较

Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas

  • 摘要: 一种针对仿真腔室的二维混杂模拟被用来研究双频容性耦合等离子体 (CCP)放电特性。根据实验测得的放电环境, 可通过模拟计算出各等离子体参数如密度分布、粒子流、电子温度分布, 以及电子和离子的能量分布等。一种自行设计的全悬浮双探针也用来测量等离子体密度及电子温度分布。同时通过质谱测量离子能量分布 (IEDF)。实验测量结果跟数值模拟结果符合的是比较一致的。从结果中可以看出腔室结构对等离子体性质会有很大影响。

     

    Abstract: A two-dimensional hybrid simulation scheme is proposed to study the characteristics of dual-frequency (DF) capacitively coupled plasma (CCP) discharge based on the geometry of real device. Given the experimental parameters for argon plasma, the output from the fluid module such as ion density, number flux, electron temperature and the Monte-Carlo collision (MCC) results of ion energy distribution function (IEDF) as well as electron energy distribution function (EEDF) are obtained and discussed in detail. A novel complete floating double probe is designed to measure both density and temperature of electron and a quadrupole mass spectrometer is also equipped for IEDF investigations. The measurements on the density of bulk plasma, electron temperature and IEDF agree well, qualitatively, with the simulated results. A comparison with experimental results indicates that, since the structure of real device is taken into account, this model is capable of describing the global dynamic characteristics occurred in DF-CCP and presenting more reliable results than the model with an ideal chamber structure.

     

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