Electron Energy and the Effective Electron Temperature of Nanosecond Pulsed Argon Plasma Studied by Global Simulations Combined with Optical Emission Spectroscopic Measurements

WEN Xueqing (闻雪晴); XIN Yu (信裕); FENG Chunlei (冯春雷); DING Hongbin (丁洪斌)

doi:10.1088/1009-0630/14/1/10

Plasma Science and Technology > 2012 > 14(1): 40-47. > DOI: 10.1088/1009-0630/14/1/10

WEN Xueqing (闻雪晴), XIN Yu (信裕), FENG Chunlei (冯春雷), DING Hongbin (丁洪斌). Electron Energy and the Effective Electron Temperature of Nanosecond Pulsed Argon Plasma Studied by Global Simulations Combined with Optical Emission Spectroscopic Measurements[J]. Plasma Science and Technology, 2012, 14(1): 40-47. DOI: 10.1088/1009-0630/14/1/10

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Electron Energy and the Effective Electron Temperature of Nanosecond Pulsed Argon Plasma Studied by Global Simulations Combined with Optical Emission Spectroscopic Measurements

School of Physics and Optical Electronic Technology, Key Laboratory of Material Modification by Laser, Ion and Electron Beam, Chinese Ministry of Education, Dalian University of Technology, 116023 Dalian, China

Funds: supported by The National Natural Science Foundation of China (nos. 10875023,11175035), the PhD research program (no. 200801411040 ) of Educational Ministry, the Scientific and Technical Foundation of Liaoning Province (no. 20082168) and National Magnetic Confinement Fusion Science Program of China (nos. 2009GB106004, 2008CB717801).

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Received Date: August 05, 2011

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Abstract

Abstract

The behavior of argon plasma driven by nanosecond pulsed plasma in a low-pressure plasma reactor is investigated using a global model, and the results are compared with the experimental measurements. The time evolution of plasma density and the electron energy probability function are calculated by solving the energy balance and Boltzmann equations. During and shortly after the discharge pulse, the electron energy probability function can be represented by a bi-Maxwellian distribution, indicating two energy groups of electrons. According to the effective electron temperature calculation, we find that there are more high-energy electrons that play an important role in the excitation and ionization processes than low-energy electrons. The effective electron temperature is also measured via optical emission spectroscopy to evaluate the simulation model. In the comparison, the simulation results are found to be in agreement with the measurements. Furthermore, variations of the effective electron temperature are presented versus other discharge parameters, such as pulse width time, pulse rise time and gas pressure.
- effective electron temperature,
- nanosecond pulsed glow discharge,
- global model,
- optical emission spectrum

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