Investigation of Microwave Surface-Wave Plasma Deposited SiO<sub> x</sub> Coatings on Polymeric Substrates

WANG Huan(王欢); YANG Lizhen(杨丽珍); CHEN Qiang(陈强)

doi:10.1088/1009-0630/16/1/08

Plasma Science and Technology > 2014 > 16(1): 37-40. > DOI: 10.1088/1009-0630/16/1/08

WANG Huan(王欢), YANG Lizhen(杨丽珍), CHEN Qiang(陈强). Investigation of Microwave Surface-Wave Plasma Deposited SiO_x Coatings on Polymeric Substrates[J]. Plasma Science and Technology, 2014, 16(1): 37-40. DOI: 10.1088/1009-0630/16/1/08

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Investigation of Microwave Surface-Wave Plasma Deposited SiO_x Coatings on Polymeric Substrates

Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600, China

Funds: supported financially by National Natural Science Foundation of China (Nos.11175024, 11375031), Beijing Natural Science Foun- dation (No.1112012), and the National Science & Technology Pillar Program for the 12th Five-year Plan, 2011BAD24B01; Bei- jing Education Committee Foundation of Science and Technology (Nos.KM2011100015008, KM201010015005), BIGC Key Project (No.23190113051) and PHR20110516, PHR201107145, Fujian Provincial Department of Science and Technology Key Project of China (No.2012H0008)

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Received Date: August 20, 2013

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Abstract

In this paper, we reported nano-scale SiO _x coatings deposited on polyethylene terephthalate (PET) webs by microwave surface-wave assisted plasma enhanced chemical vapor deposition for the purpose of improving their barrier properties. Oxygen (O ₂) and hexamethyl- disiloxane (HMDSO) were employed as oxidant gas and Si monomer during SiO x deposition, re- spectively. Analysis by Fourier transform infrared spectroscope (FTIR) for chemical structure and observation by atomic force microscopy (AFM) for surface morphology of SiO _xcoatings demon- strated that both chemical compounds and surface feature of coatings have a remarkable influence on the coating barrier properties. It is noted that the processing parameters play a critical role in the barrier properties of coatings. After optimization of the SiO x coatings deposition conditions, i.e. the discharge power of 1500 W, 2:1 of O ₂ :HMDSO ratio and working pressure of 20 Pa, a better barrier property was achieved in this work.
- silicon oxide,
- barrier properties,
- microwave surface wave,
- PET

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Investigation of Microwave Surface-Wave Plasma Deposited SiO x Coatings on Polymeric Substrates

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Investigation of Microwave Surface-Wave Plasma Deposited SiO_x Coatings on Polymeric Substrates