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YAN Rong (鄢容), CHEN Junling (陈俊凌), CHEN Longwei (陈龙威), et al.. Cleaning of HT-7 Tokamak Exposed First Mirrors by Radio Frequency Magnetron Sputtering Plasma[J]. Plasma Science and Technology, 2014, 16(12): 1158-1162. DOI: 10.1088/1009-0630/16/12/13
Citation: YAN Rong (鄢容), CHEN Junling (陈俊凌), CHEN Longwei (陈龙威), et al.. Cleaning of HT-7 Tokamak Exposed First Mirrors by Radio Frequency Magnetron Sputtering Plasma[J]. Plasma Science and Technology, 2014, 16(12): 1158-1162. DOI: 10.1088/1009-0630/16/12/13

Cleaning of HT-7 Tokamak Exposed First Mirrors by Radio Frequency Magnetron Sputtering Plasma

  • The stainless steel (SS) first mirror pre-exposed in the deposition-dominated envi- ronment of the HT-7 tokamak was cleaned in the newly built radio frequency (RF) magnetron sputtering plasma device. The deposition layer on the FM surface formed during the exposure was successfully removed by argon plasma with a RF power of about 80 W and a gas pressure of 0.087 Pa for 30 min. The total reflectivity of the mirrors was recovered up to 90% in the wavelength range of 300-800 nm, while the diffuse reflectivity showed a little increase, which was attributed to the increase of surface roughness in sputtering, and residual contaminants. The FMs made from single crystal materials could help to achieve a desired recovery of specular reflectivity in the future.
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