Mechanical Properties and Uniformity of Nanocrystalline Diamond Coating Deposited Around a Sphere by MPCVD

CHEN Hongyun (陈虹运); GOU Li (芶立)

doi:10.1088/1009-0630/17/12/10

Plasma Science and Technology > 2015 > 17(12): 1038-1042. > DOI: 10.1088/1009-0630/17/12/10

CHEN Hongyun (陈虹运), GOU Li (芶立). Mechanical Properties and Uniformity of Nanocrystalline Diamond Coating Deposited Around a Sphere by MPCVD[J]. Plasma Science and Technology, 2015, 17(12): 1038-1042. DOI: 10.1088/1009-0630/17/12/10

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Mechanical Properties and Uniformity of Nanocrystalline Diamond Coating Deposited Around a Sphere by MPCVD

School of Materials Science and Engineering, Sichuan University, Chengdu 610065, China

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Received Date: January 06, 2015

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Abstract

Abstract

Nanocrystalline diamond coatings were deposited by MPCVD on the spheres used for a ball bearing. The nanocrystalline coatings with a grain size of 50 nm were con?rmed by the surface morphology and composition analysis. The hardness of the coating is 20-40 GPa tested by nanoindentation, which is higher than that of tungsten carbide and silicon nitride substrates. The coating around the sphere observed from the Micro CT images is uniform with a thickness of 12 μm.
- solid lubricating coating,
- nanocrystalline diamond,
- mechanical properties,
- MPCVD

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References

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