Preliminary Study of a Hybrid Helicon-ECR Plasma Source

A. M. HALA; L. OKSUZ; ZHU Ximing

doi:10.1088/1009-0630/18/8/07

Plasma Science and Technology > 2016 > 18(8): 832-836. > DOI: 10.1088/1009-0630/18/8/07

A. M. HALA, L. OKSUZ, ZHU Ximing. Preliminary Study of a Hybrid Helicon-ECR Plasma Source[J]. Plasma Science and Technology, 2016, 18(8): 832-836. DOI: 10.1088/1009-0630/18/8/07

Citation:

A. M. HALA, L. OKSUZ, ZHU Ximing. Preliminary Study of a Hybrid Helicon-ECR Plasma Source[J]. Plasma Science and Technology, 2016, 18(8): 832-836. DOI: 10.1088/1009-0630/18/8/07

Citation:

A. M. HALA, L. OKSUZ, ZHU Ximing. Preliminary Study of a Hybrid Helicon-ECR Plasma Source[J]. Plasma Science and Technology, 2016, 18(8): 832-836. DOI: 10.1088/1009-0630/18/8/07

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Preliminary Study of a Hybrid Helicon-ECR Plasma Source

1The National Center for Applied Physics, Material Science Research Institute, King Abdul Aziz City for Science and Technology (KACST), Riyadh 11442, Saudi Arabia 2S¨uleyman Demirel university, Science and literature faculty, Physics department, Isparta 32260, Turkey 3Institute for Plasma and Atomic Physics, Ruhr University, Bochum 44780, Germany

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Received Date: September 15, 2015

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Abstract

Abstract

A new type of hybrid discharge is experimentally investigated in this work. A helicon source and an electron cyclotron resonance (ECR) source were combined to produce plasma. As a preliminary study of this type of plasma, the optical emission spectroscopy (OES) method was used to obtain values of electron temperature and density under a series of typical conditions. Generally, it was observed that the electron temperature decreases and the electron density increases as the pressure increased. When increasing the applied power at a certain pressure, the average electron density at certain positions in the discharge does not increase significantly possibly due to the high degree of neutral depletion. Electron temperature increased with power in the hybrid mode. Possible mechanisms of these preliminary observations are discussed.
- helicon,
- plasma,
- ECR,
- hybrid,
- discharge

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References (1)

References

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