Investigation of structure and mechanical properties of plasma vapor deposited nanocomposite TiBN films

Bin HAN (韩滨); D NEENA; Zesong WANG (王泽松); K K KONDAMAREDDY; Na LI (李娜); Wenbin ZUO (左文彬); Shaojian YAN (闫少健); Chuansheng LIU (刘传胜); Dejun FU (付德君)

doi:10.1088/2058-6272/aa57eb

Plasma Science and Technology > 2017 > 19(4): 45503-045503. > DOI: 10.1088/2058-6272/aa57eb

Bin HAN (韩滨), D NEENA, Zesong WANG (王泽松), K K KONDAMAREDDY, Na LI (李娜), Wenbin ZUO (左文彬), Shaojian YAN (闫少健), Chuansheng LIU (刘传胜), Dejun FU (付德君). Investigation of structure and mechanical properties of plasma vapor deposited nanocomposite TiBN films[J]. Plasma Science and Technology, 2017, 19(4): 45503-045503. DOI: 10.1088/2058-6272/aa57eb

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Investigation of structure and mechanical properties of plasma vapor deposited nanocomposite TiBN films

School of Physics and Technology and Key Laboratory of Arti?cial Micro-and Nano-Materials of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory, Wuhan University, Wuhan 430072, People’s Republic of China

Funds: This work was supported by National Natural Science Foundation of China under grant 11375135 and International Cooperation Program of the Ministry of Science and Technology under grant 2015DFR00720.

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Received Date: August 31, 2016

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Abstract

Abstract

TiBN coatings have huge potential applications as they have excellent properties with increasing modern industrial requirements. Nanocomposite TiBN coatings were synthesized on cemented carbide, high speed steel and Si substrates by using cathodic arc plasma ion plating from pure TiB₂ ceramic targets. The structure and mechanical properties of the TiBN coatings were significantly influenced by the nitrogen partial pressure. Rutherford backscattering spectrometry demonstrates that the nitrogen content of the coating varied from 2.8% to 34.5% and high-resolution electron microscopy images reveal that all coatings have the characteristic of nanocrystals embedded in an amorphous matrix. The root-mean-square roughness of the coatings increases from 3.73 to 14.64 nm and the coefficients of friction of the coatings at room temperature vary from 0.54 to 0.73 with increasing nitrogen partial pressure. The microhardness of the coating increases up to 35.7 GPa at 10 sccm N₂ flow rate. The smallest wear rate is 2.65×10⁻¹⁵m³N^–1m^–1 which indicates that TiBN coatings have excellent wear resistance. The adhesion test revealed that the TiBN coatings have good adhesion at low nitrogen partial pressure.
- TiBN, nanocomposite,
- RBS,
- tribological properties,
- HRTEM

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