Numerical analysis of thermal plasma scrubber for CF<sup><sub>4</sub></sup> decomposition

J KO; T H KIM; S CHOI

doi:10.1088/2058-6272/aafbba

Plasma Science and Technology > 2019 > 21(6): 64002-064002. > DOI: 10.1088/2058-6272/aafbba

J KO, T H KIM, S CHOI. Numerical analysis of thermal plasma scrubber for CF^₄ decomposition[J]. Plasma Science and Technology, 2019, 21(6): 64002-064002. DOI: 10.1088/2058-6272/aafbba

Citation:

J KO, T H KIM, S CHOI. Numerical analysis of thermal plasma scrubber for CF^₄ decomposition[J]. Plasma Science and Technology, 2019, 21(6): 64002-064002. DOI: 10.1088/2058-6272/aafbba

Citation:

J KO, T H KIM, S CHOI. Numerical analysis of thermal plasma scrubber for CF^₄ decomposition[J]. Plasma Science and Technology, 2019, 21(6): 64002-064002. DOI: 10.1088/2058-6272/aafbba

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Numerical analysis of thermal plasma scrubber for CF^₄ decomposition

J KO¹,
T H KIM^2,3,
S CHOI^1,2,3

¹ Department of Nuclear and Energy Engineering, Jeju National University, Jeju 63243, Republic of Korea
² Institute for Nuclear Science and Technology, Jeju National University, Jeju 63243, Republic of Korea

Funds: This project is supported by the ‘R&D Center for Reduction of Non-CO₂ Greenhouse Gases (2017002430003)’ funded by the Korea Ministry of Environment (MOE) as ‘Global Top Environment R&D Program’ and National Research Foundation of Republic of Korea (NRF-2015 M2B2A9030393).

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Received Date: September 21, 2018

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Abstract

Abstract

CF₄ gas emitted in the semiconductor and display manufacturing process is a very harmful greenhouse gas. It must be removed or converted safely due to its extreme toxicity. Although a CF₄ decomposition system using a thermal plasma scrubber was commercialized, its removal efficiency is limited. In this work, a numerical analysis of CF₄ decomposition in the thermal plasma scrubber was carried out in order to propose an efficient decomposition environment. The decomposition and recombination temperatures of CF₄ were analyzed using thermodynamic equilibrium calculations. The chemical reaction of CF₄ decomposition into carbon and fluorine gas was considered in this numerical analysis. The injection position and angle of the CF₄ were controlled in order to enhance the decomposition rate. The vertical injection of CF₄ near the torch exit improved the mixing of the CF₄ with the thermal plasma flame. In addition, it was confirmed that the high temperature region expanded due to a vortex generated by strong turbulence in the bottleneck-shaped reactor. As a result, it is revealed that the CF₄ injection location and the reactor configuration are the most important factors in improving the decomposition rate.
- numerical simulation,
- decomposition,
- CF₄,
- thermal plasma,
- scrubber

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Numerical analysis of thermal plasma scrubber for CF4 decomposition

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Numerical analysis of thermal plasma scrubber for CF^₄ decomposition