Plasma-assisted abatement of SF<sub>6</sub> in a packed bed plasma reactor: understanding the effect of gas composition

Xiaoxing ZHANG (张晓星); Yuan TIAN (田远); Zhaolun CUI (崔兆仑); Ju TANG (唐炬)

doi:10.1088/2058-6272/ab65b2

Plasma Science and Technology > 2020 > 22(5): 55502-055502. > DOI: 10.1088/2058-6272/ab65b2

Xiaoxing ZHANG (张晓星), Yuan TIAN (田远), Zhaolun CUI (崔兆仑), Ju TANG (唐炬). Plasma-assisted abatement of SF₆ in a packed bed plasma reactor: understanding the effect of gas composition[J]. Plasma Science and Technology, 2020, 22(5): 55502-055502. DOI: 10.1088/2058-6272/ab65b2

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Plasma-assisted abatement of SF₆ in a packed bed plasma reactor: understanding the effect of gas composition

¹ School of Electrical Engineering and Automation, Wuhan University, Wuhan 430072, People's Republic of China
² School of Electrical and Electronic Engineering, Hubei University of Technology, Wuhan 430068, People's Republic of China

Funds: This study is funded by National Natural Science Foundation of China (No. 51777144) and State Grid Science and Technology Project (SGHB0000KXJS1800554).

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Received Date: September 20, 2019
Revised Date: December 24, 2019
Accepted Date: December 25, 2019

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Abstract

Abstract

The potential impact of SF₆ as a potent greenhouse gas on the global climate is highly attractive. This paper studies the effect of H₂O concentration, SF₆ inlet concentration and pre-heating temperature on SF₆ abatement in a packed bed plasma reactor in terms of the removal efficiency and products selectivity. The results showed that the best performance in SF₆ abatement was obtained at 1% H₂O and 100 °C with 98.7% destruction and remove efficiency (DRE) at 2% SF₆. Higher energy yields was obtained under higher SF₆ inlet concentration. Moreover, the existence of water vapor weakened the micro-discharge and provided H and OH radicals for this system, which showed a close relationship to removal efficiency and products selectivity. Among four sulfur-containing products, SO₂F₂ was more stable than SOF₂, SOF₄ and SO₂. Meanwhile, SOF₄ and SO₂ were very susceptible to the above parameters. This article provides a better understanding of SF₆ abatement in a view of both scientific and engineering.
- SF₆,
- PBR,
- plasma,
- gas composition

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Plasma-assisted abatement of SF₆ in a packed bed plasma reactor: understanding the effect of gas composition