Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges

Kai ZHAO (赵凯); Yongxin LIU (刘永新); Quanzhi ZHANG (张权治); Demetre J ECONOMOU; Younian WANG

doi:10.1088/2058-6272/ac1cce

Plasma Science and Technology > 2021 > 23(11): 115404. > DOI: 10.1088/2058-6272/ac1cce

Kai ZHAO (赵凯), Yongxin LIU (刘永新), Quanzhi ZHANG (张权治), Demetre J ECONOMOU, Younian WANG. Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges[J]. Plasma Science and Technology, 2021, 23(11): 115404. DOI: 10.1088/2058-6272/ac1cce

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Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges

¹ Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, People's Republic of China
² Plasma Processing Laboratory, William A. Brookshire Department of Chemical and Biomolecular Engineering, University of Houston, Houston, Texas 77204-4004, United States of America

Funds: This work has been financially supported by National Natural Science Foundation of China (NSFC) (Nos. 12005035 and 11935005), China Postdoctoral Science Foundation (Nos. 2020M670741 and 2021T140085), and Fundamental Research Funds for the Central Universities (No. DUT20LAB201). DJE is grateful to National Science Foundation (No. PHY-1500518) and to Department of Energy Office of Fusion Energy Science (No. DE-SC0001939) for financial support.

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Received Date: May 23, 2021
Revised Date: August 10, 2021
Accepted Date: August 10, 2021

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Abstract

Abstract

It is recognized that standing wave effects appearing in large-area, very-high-frequency capacitively coupled plasma (CCP) reactors cause center-high plasma non-uniformity. Using a high-frequency magnetic probe, we present a direct experimental diagnostic of the nonlinear standing waves and bulk ohmic electron power absorption dynamics in low pressure CCP discharges for different driving frequencies of 13.56, 30, and 60 MHz. The design, principle, calibration, and validation of the probe are described in detail. Spatial structures of the harmonics of the magnetic field, determined by the magnetic probe, were used to calculate the distributions of the harmonic current and the corresponding ohmic electron power deposition, providing insights into the behavior of nonlinear harmonics. At a low driving frequency, i.e. 13.56 MHz, no remarkable nonlinear standing waves were identified and the bulk ohmic electron power absorption was observed to be negligible. The harmonic magnetic field/current was found to increase dramatically with the driving frequency, due to decreased sheath reactance and more remarkable nonlinear standing waves at a higher driving frequency, leading to the enhancements of the ohmic heating and the plasma density in the bulk, specifically at the electrode center. At a high driving frequency, i.e. 60 MHz, the high-order harmonic current density and the corresponding ohmic electron power absorption exhibited a similar node structure, with the main peak on axis, and one or more minor peaks between the electrode center and the edge, contributing to the center-high profile of the plasma density.
- capacitively coupled plasmas,
- magnetic probe,
- nonlinear standing waves,
- ohmicheating

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Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges

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