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Shuangyuan FENG, Shin KAJITA, Masayuki TOKITANI, Daisuke NAGATA, Noriyasu OHNO. Rapid growth of nanostructure on tungsten thin film by exposure to helium plasma[J]. Plasma Science and Technology, 2023, 25(4): 042001. DOI: 10.1088/2058-6272/ac9f2d
Citation: Shuangyuan FENG, Shin KAJITA, Masayuki TOKITANI, Daisuke NAGATA, Noriyasu OHNO. Rapid growth of nanostructure on tungsten thin film by exposure to helium plasma[J]. Plasma Science and Technology, 2023, 25(4): 042001. DOI: 10.1088/2058-6272/ac9f2d

Rapid growth of nanostructure on tungsten thin film by exposure to helium plasma

  • A fiberform nanostructure was synthesized by exposing high-density helium plasma to a 100 nm thick tungsten thin film in the linear plasma device NAGDIS-II. After helium plasma exposure, the cross-section of samples was observed by a scanning electron microscope, transmission electron microscope, and focused ion beam scanning electron microscope. It is shown that the thickness of the nanostructured layer increases significantly for only a short irradiation time. The optical absorptivity remains high, even though it is exposed to helium plasma for a short time. The usage of the thin film can shorten the processing time for nanostructure growth, which will be beneficial for commercial production.
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