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Shouxian TANG, Di TIAN, Zheng LI, Zhengduo WANG (王正铎), Bowen LIU (刘博文), Jiushan CHENG, Zhongwei LIU. Preparation of palladium-based catalyst by plasma-assisted atomic layer deposition and its applications in CO2 hydrogenation reduction[J]. Plasma Science and Technology. DOI: 10.1088/2058-6272/ad1fd9
Citation: Shouxian TANG, Di TIAN, Zheng LI, Zhengduo WANG (王正铎), Bowen LIU (刘博文), Jiushan CHENG, Zhongwei LIU. Preparation of palladium-based catalyst by plasma-assisted atomic layer deposition and its applications in CO2 hydrogenation reduction[J]. Plasma Science and Technology. DOI: 10.1088/2058-6272/ad1fd9

Preparation of palladium-based catalyst by plasma-assisted atomic layer deposition and its applications in CO2 hydrogenation reduction

  • Supported Pd catalyst is an important noble metal material in recent years due to its high catalytic performance in CO2 hydrogenation. A fluidized-bed plasma assisted atomic layer deposition (FP-ALD) process is reported to fabricate Pd nanoparticle catalyst over γ-Al2O3 or Fe2O3/γ-Al2O3 support, using palladium hexafluoroacetylacetonate as the Pd precursor and H2 plasma as counter-reactant. Scanning transmission electron microscopy exhibits that high-density Pd nanoparticles are uniformly dispersed over Fe2O3/γ-Al2O3 support with an average diameter of 4.4 nm. The deposited Pd-Fe2O3/γ-Al2O3 shows excellent catalytic performance for CO2 hydrogenation in a dielectric barrier discharge reactor. Under a typical condition of H2 to CO2 ratio of 4 in the feed gas, the discharge power of 19.6 W, and gas hourly space velocity of 10000 h−1, the conversion of CO2 is as high as 16.3% with CH3OH and CH4 selectivities of 26.5% and 3.9%, respectively.
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