Effect of dielectric material on the uniformity of nanosecond pulsed dielectric barrier discharge

Dielectric barrier discharge (DBD) is considered as a promising technique to produce large volume uniform plasma at atmospheric pressure, and the dielectric barrier layer between the electrodes plays a key role in the DBD processes and enhancing discharge uniformity. In this work, the uniformity and discharge characteristics of the nanosecond (ns) pulsed DBD with dielectric barrier layers made of alumina, quartz glass, polycarbonate (PC), and polypropylene (PP) are investigated via discharge image observation, voltage-current waveform measurement and optical emission spectral diagnosis. Through analyzing discharge image by gray value standard deviation method, the discharge uniformity is quantitatively calculated. The effects of the space electric field intensity, the electron density (N_e), and the space reactive species on the uniformity are studied with quantifying the gap voltage U_g and the discharge current I_g, analyzing the recorded optical emission spectra, and simulating the temporal distribution of N_e with a one-dimensional fluid model. It is found that as the relative permittivity of the dielectric materials increases, the space electric field intensity is enhanced, which results in a higher N_e and electron temperature (T_e). Therefore, an appropriate value of space electric field intensity can promote electron avalanches, resulting in uniform and stable plasma by the merging of electron avalanches. However, an excessive value of space electric field intensity leads to the aggregation of space charges and the distortion of the space electric field, which reduce the discharge uniformity. The surface roughness and the surface charge decay are measured to explain the influences of the surface properties and the second electron emission on the discharge uniformity. The results in this work give a comprehensive understanding of the effect of the dielectric materials on the DBD uniformity, and contribute to the selection of dielectric materials for DBD reactor and the realization of atmospheric pressure uniform, stable, and reactive plasma sources.