Experimental Study of the Effect of Applied Magnetic Field on Plasma Properties of Unbalanced Magnetron Sputtering

MU Zongxin (牟宗信); WANG Chun (王春); MU Xiaodong (牟晓东); JIA Li (贾莉); LIU Shengguang (刘升光); DONG Chuang(董闯)

Plasma Science and Technology > 2010 > 12(5): 571-576.

MU Zongxin (牟宗信), WANG Chun (王春), MU Xiaodong (牟晓东), JIA Li (贾莉), LIU Shengguang (刘升光), DONG Chuang(董闯). Experimental Study of the Effect of Applied Magnetic Field on Plasma Properties of Unbalanced Magnetron Sputtering[J]. Plasma Science and Technology, 2010, 12(5): 571-576.

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Experimental Study of the Effect of Applied Magnetic Field on Plasma Properties of Unbalanced Magnetron Sputtering

Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, School of Physics and Optoelectronic technology, Dalian University of Technology, Dalian 116024, China

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Abstract

Abstract

An experimental study of the effect of applied magnetic field on the properties of the plasma and electrostatic oscillations in an unbalanced magnetron sputtering discharge was carried out. The apparatus consists of a magnetron sputtering target, using the conventional magnetic field configuration, and a coaxial coil around the target for an applied axial magnetic field. The dependencies of plasma parameters on the coil current were studied by two Langmuir probes. The resonance properties of electrostatic oscillations were observed. The results indicate that the applied magnetic field affects the plasma properties for the coil current in a range of 0 to 8 A. The frequency bandwidth of the electrostatic oscillations in the unbalanced magnetron sputtering plasma is in a range of 0 to 300 kHz. From the spectrum analysis, the eigenfrequency near the target is in a range of 20 to 50 kHz under typical experimental conditions where all the magnetic field, pressure, and power etc are able to have full impact on the spectrum characteristics. The calculated value of the electron temperature as per an ion acoustic standing wave pattern inside the magnetic trap is in good agreement with the experimental result.
- plasma,
- magnetron sputtering,
- oscillation,
- resonance

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[1]	Gongshun LI, Tao ZHANG, Kangning GENG, Fei WEN, Kaixuan YE, Liqing XU, Xiang ZHU, Xuexi ZHANG, Fubin ZHONG, Zhen ZHOU, Shuqi YANG, Ziqiang ZHOU, Lin YU, Ting LAN, Shouxin WANG, Ang TI, Shoubiao ZHANG, Haiqing LIU, Guoqiang LI, Xiang GAO, the EAST Team. Observation of Doppler shift ${\mathit{f}}_{\mathbf{D}}$ modulated by the internal kink mode using conventional reflectometry in the EAST tokamak[J]. Plasma Science and Technology, 2024, 26(3): 034001. DOI: 10.1088/2058-6272/ad0b78
[2]	Guanming YANG, Yueqiang LIU, Zhibin WANG, Yongqin WANG, Yutian MIAO, Guangzhou HAO. Effect of ideal internal MHD instabilities on NBI fast ion redistribution in ITER 15 MA scenario[J]. Plasma Science and Technology, 2023, 25(5): 055102. DOI: 10.1088/2058-6272/acab43
[3]	Zhihui ZOU, Ping ZHU, Charlson C KIM, Wei DENG, Xianqu WANG, Yawei HOU. Frequency multiplication with toroidal mode number of kink/fishbone modes on a static HL-2A-like tokamak[J]. Plasma Science and Technology, 2022, 24(12): 124005. DOI: 10.1088/2058-6272/aca00a
[4]	Yuqi CHU, Haiqing LIU, Shoubiao ZHANG, Liqing XU, Erzhong LI, Yinxian JIE, Hui LIAN, Tianfu ZHOU, Xi FENG, Xuexi ZHANG, Yunfei WANG, Xiang ZHU, Chenbin WU, Shouxin WANG, Yao YANG, K HANADA, Bo LYU, Yingying LI, Qing ZANG, EAST Team. Magnetohydrodynamic effect of internal transport barrier on EAST tokamak[J]. Plasma Science and Technology, 2022, 24(3): 035102. DOI: 10.1088/2058-6272/ac2726
[5]	Zhihui ZOU (邹志慧), Ping ZHU (朱平), Charlson C KIM (金智善), Xianqu WANG (王先驱), Yawei HOU (侯雅巍). Transition from fishbone mode to β-induced Alfvén eigenmode on HL-2A tokamak[J]. Plasma Science and Technology, 2021, 23(9): 95107-095107. DOI: 10.1088/2058-6272/ac0b97
[6]	SHI Tonghui (石同辉), WAN Baonian (万宝年), SUN Youwen (孙有文), SHEN Biao (沈飚), QIAN Jinping (钱金平), HU Liqun (胡立群), CHEN Kaiyun (陈开云), LIU Yong (刘永). The Coupling Structure Features Between (2,1) NTM and (1,1) Internal Mode in EAST Tokamak[J]. Plasma Science and Technology, 2015, 17(5): 358-365. DOI: 10.1088/1009-0630/17/5/02
[7]	LIU Chao(刘超), LIU Yue(刘悦), MA Zhaoshuai(马照帅). Effect of Equilibrium Current Profiles on External Kink Modes in Tokamaks[J]. Plasma Science and Technology, 2014, 16(8): 726-731. DOI: 10.1088/1009-0630/16/8/02
[8]	XU Ming (徐明), WEN Yizhi (闻一之), XIE Jinlin (谢锦林), YU Changxuan (俞昌旋), et al.. Internal Magnetic Configuration Measured by ECE Imaging on EAST Tokamak[J]. Plasma Science and Technology, 2013, 15(12): 1194-1196. DOI: 10.1088/1009-0630/15/12/05
[9]	LI Zebin (李泽彬), SUN Guoya (孙国亚), Ihor HOLOD, XIAO Yong (肖湧), et al. GTC Simulation of Ideal Ballooning Mode in Tokamak Plasmas[J]. Plasma Science and Technology, 2013, 15(6): 499-505. DOI: 10.1088/1009-0630/15/6/03
[10]	Vahid Abbasi, Ahmad Gholami, Kaveh Niayesh. Three-dimensional Simulation of Plasma Deformation during Contact Opening in a Circuit Breaker, including Analyses of Kink and Sausage Instabilities[J]. Plasma Science and Technology, 2012, 14(11): 996-1001. DOI: 10.1088/1009-0630/14/11/07