A Simple Model for the Calculation of Plasma Impedance in Atmospheric Radio Frequency Discharges

GE Lei(葛蕾); ZHANG Yuantao(张远涛)

doi:10.1088/1009-0630/16/10/05

Plasma Science and Technology > 2014 > 16(10): 924-929. > DOI: 10.1088/1009-0630/16/10/05

GE Lei(葛蕾), ZHANG Yuantao(张远涛). A Simple Model for the Calculation of Plasma Impedance in Atmospheric Radio Frequency Discharges[J]. Plasma Science and Technology, 2014, 16(10): 924-929. DOI: 10.1088/1009-0630/16/10/05

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A Simple Model for the Calculation of Plasma Impedance in Atmospheric Radio Frequency Discharges

Shandong Provincial Key Lab of UHV Technology and Gas Discharge Physics, School of Electrical Engineering, Shandong University, Jinan 250061, China

Funds: supported by National Natural Science Foundation of China (No. 11375107) and Independent Innovation Foundation of Shandong University of China (No. 2012TS067)

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Received Date: November 19, 2013

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Abstract

Abstract

In atmospheric radio-frequency (rf) discharges, the plasma parameters, such as elec- tron density, sheath thickness and sheath voltage, are not easy to be probed experimentally, while the electrical characteristics, such as impedance, resistance and reactance, are relatively conve- nient to be measured. In this paper we presented a simple theoretical model derived from the fluid description of generated plasmas without considering the circuit model, to investigate the relationship between the plasma impedance and plasma parameters. By introducing a relaxation frequency, the plasma impedance could be predicted by formulas presented in this study, and the mean electron density and sheath thickness can also be calculated from the measured or simulated impedance and reactance, respectively.
- radio frequency discharges,
- atmospheric discharges,
- electron density,
- plasma simulation

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References (25)

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