Mode transition induced by gas pressure in dusty acetylene microdischarges: two-dimensional simulation

Xiangmei LIU (刘相梅); Ningning ZU (祖宁宁); Hongying LI (李洪影); Jingyao LI (李景尧)

doi:10.1088/2058-6272/ab571f

Plasma Science and Technology > 2020 > 22(4): 45402-045402. > DOI: 10.1088/2058-6272/ab571f

Xiangmei LIU (刘相梅), Ningning ZU (祖宁宁), Hongying LI (李洪影), Jingyao LI (李景尧). Mode transition induced by gas pressure in dusty acetylene microdischarges: two-dimensional simulation[J]. Plasma Science and Technology, 2020, 22(4): 45402-045402. DOI: 10.1088/2058-6272/ab571f

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Mode transition induced by gas pressure in dusty acetylene microdischarges: two-dimensional simulation

School of Science, Qiqihar University, Qiqihar 161006, People's Republic of China

Funds: This work was supported by National Natural Science Foundation of China (Nos. 11805107 and 21703112) and the Fundamental Research Funds in Heilongjiang Provincial Universities of China (No. 135209312).

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Received Date: July 29, 2019
Revised Date: November 10, 2019
Accepted Date: November 12, 2019

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Abstract

Abstract

Radio-frequency microdischarge in acetylene is investigated by use of a fluid model and an aerosol dynamics model in a cylindrical discharge chamber. In this article, the results at a pressure of 100–500 Torr, a voltage of 80–150 V, and an electrode gap of 400–1000 μm are carefully analyzed and discussed. It is shown that two electron heating modes α and γ appear in the microdischarge, and the pressure-dependent transition from α to γ was accompanied by the abrupt decrease of electron density and electron temperature. The mode transition phenomenon is further confirmed by the variation of the electron temperature axial profiles, the profiles vary continuously from a center high at the pressure of 100 Torr to an edge high at the pressure of 500 Torr. Furthermore, in the α mode (100 Torr) the plasma density increases linearly with the increase of electrode gap, but decreases sharply with the increase of electrode gap in the γ mode (>100 Torr). The gas pressure and applied voltage effects on the nanoparticle density and degree of nonuniformity are also investigated. It has been shown that the gas pressure greatly influences the axial profiles of nanoparticle density and the values of the degree of nonuniformity, while the values of the plasma parameters (electron density and nanoparticle density) strongly depend on the applied voltage.
- radio-frequency capacitive discharge,
- acetylene microplasma,
- nanoparticle dynamics

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References (24)

References

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