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Xiaoxing ZHANG (张晓星), Yuan TIAN (田远), Zhaolun CUI (崔兆仑), Ju TANG (唐炬). Plasma-assisted abatement of SF6 in a packed bed plasma reactor: understanding the effect of gas composition[J]. Plasma Science and Technology, 2020, 22(5): 55502-055502. DOI: 10.1088/2058-6272/ab65b2
Citation: Xiaoxing ZHANG (张晓星), Yuan TIAN (田远), Zhaolun CUI (崔兆仑), Ju TANG (唐炬). Plasma-assisted abatement of SF6 in a packed bed plasma reactor: understanding the effect of gas composition[J]. Plasma Science and Technology, 2020, 22(5): 55502-055502. DOI: 10.1088/2058-6272/ab65b2

Plasma-assisted abatement of SF6 in a packed bed plasma reactor: understanding the effect of gas composition

Funds: This study is funded by National Natural Science Foundation of China (No. 51777144) and State Grid Science and Technology Project (SGHB0000KXJS1800554).
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  • Received Date: September 20, 2019
  • Revised Date: December 24, 2019
  • Accepted Date: December 25, 2019
  • The potential impact of SF6 as a potent greenhouse gas on the global climate is highly attractive. This paper studies the effect of H2O concentration, SF6 inlet concentration and pre-heating temperature on SF6 abatement in a packed bed plasma reactor in terms of the removal efficiency and products selectivity. The results showed that the best performance in SF6 abatement was obtained at 1% H2O and 100 °C with 98.7% destruction and remove efficiency (DRE) at 2% SF6. Higher energy yields was obtained under higher SF6 inlet concentration. Moreover, the existence of water vapor weakened the micro-discharge and provided H and OH radicals for this system, which showed a close relationship to removal efficiency and products selectivity. Among four sulfur-containing products, SO2F2 was more stable than SOF2, SOF4 and SO2. Meanwhile, SOF4 and SO2 were very susceptible to the above parameters. This article provides a better understanding of SF6 abatement in a view of both scientific and engineering.
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