Citation: | Xiaoxing ZHANG (张晓星), Yuan TIAN (田远), Zhaolun CUI (崔兆仑), Ju TANG (唐炬). Plasma-assisted abatement of SF6 in a packed bed plasma reactor: understanding the effect of gas composition[J]. Plasma Science and Technology, 2020, 22(5): 55502-055502. DOI: 10.1088/2058-6272/ab65b2 |
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