Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy

Fengdong JIA (贾凤东); Yong WU (吴勇); Qi MIN (敏琦); Maogen SU (苏茂根); Keigo TAKEDA; Kenji ISHIKAWA; Hiroki KONDO; Makoto SEKINE; Masaru HORI; Zhiping ZHONG (钟志萍)

doi:10.1088/2058-6272/ab84e2

Plasma Science and Technology > 2020 > 22(6): 65404-065404. > DOI: 10.1088/2058-6272/ab84e2

Fengdong JIA (贾凤东), Yong WU (吴勇), Qi MIN (敏琦), Maogen SU (苏茂根), Keigo TAKEDA, Kenji ISHIKAWA, Hiroki KONDO, Makoto SEKINE, Masaru HORI, Zhiping ZHONG (钟志萍). Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy[J]. Plasma Science and Technology, 2020, 22(6): 65404-065404. DOI: 10.1088/2058-6272/ab84e2

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Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy

¹ School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, People's Republic of China
² Institute of Applied Physics and Computational Mathematics, Beijing 100088, People's Republic of China
³ Key Laboratory of Atomic and Molecular Physics & Functional Material of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, People's Republic of China
⁴ Department of Electrical and Electronic Engineering, Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan
⁵ Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
⁶ CAS Center for Excellence in Topological Quantum Computation, University of Chinese Academy of Sciences, Beijing 100190, People's Republic of China

Funds: This work is supported by the National Key Research and Development Program of China (Nos. 2017YFA0402300, 2017YFA0304900 and 2016YFA0300600), National Natural Science Foundation of China (Nos. 11604334, 11575099, 11474347 and 11874051), the Strategic Priority Research Program of Chinese Academy of Sciences (Nos. XDB28000000 and XDB07030000), the Open Research Fund Program of the State Key Laboratory of Low-Dimensional Quantum Physics (KF201807).

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Received Date: November 27, 2019
Revised Date: March 21, 2020
Accepted Date: March 25, 2020

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Abstract

Abstract

A non-equilibrium atmospheric pressure argon (Ar) plasma excited by microsecond pulse is studied experimentally by laser scattering and optical emission spectroscopy (OES), and theoretically by collisional-radiative (CR) model. More specifically, the electron temperature and electron density of plasma are obtained directly by the laser Thomson scattering, the gas temperature is measured by laser Raman scattering, the optical emissions of excited Ar states of plasma are measured by OES. The laser scattering results show that the electron temperature is about 1 eV which is similar to that excited by 60 Hz AC power, but the gas temperature is as low as 300 K compared to about 700 K excited by 60 Hz AC power. It is shown that the microsecond pulsed power supply, rather than nanosecond ones, is short enough to reduce the gas temperature of atmospheric pressure plasma to near room temperature. The electron temperature and electron density are also obtained by CR model based on OES, and find that the intensities of the optical emission intensity lines of 727.41, 811.73, 841.08, 842.83, 852.44 and 912.86 nm of Ar can be used to characterize the behavior of electron density and electron temperature, it is very useful to quickly estimate the activity of the atmospheric pressure Ar plasma in many applications.
- plasma diagnosis, laser Thomson scattering, atmospheric pressure plasma

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References (33)

References

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