Investigation of a facile plasma-driven method for <i>in situ</i> cleaning of metal-based contamination

Sishu WANG; Li YANG; Guo PU; Jianxing LIU; Wenna JING; Fujun GOU; Shuwei CHEN; Bo CHEN; Jianjun CHEN; Zongbiao YE; Jianjun WEI

doi:10.1088/2058-6272/ac763a

Plasma Science and Technology > 2023 > 25(1): 015501. > DOI: 10.1088/2058-6272/ac763a

Sishu WANG, Li YANG, Guo PU, Jianxing LIU, Wenna JING, Fujun GOU, Shuwei CHEN, Bo CHEN, Jianjun CHEN, Zongbiao YE, Jianjun WEI. Investigation of a facile plasma-driven method for in situ cleaning of metal-based contamination[J]. Plasma Science and Technology, 2023, 25(1): 015501. DOI: 10.1088/2058-6272/ac763a

Citation:

PDF (2273 KB)

Investigation of a facile plasma-driven method for in situ cleaning of metal-based contamination

1.
Institute of Atomic and Molecular Physics, Sichuan University, Chengdu 610064, People's Republic of China
2.
Key Laboratory of Radiation Physics and Technology, Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064, People's Republic of China
3.
College of Physics, Sichuan University, Chengdu 610064, People's Republic of China

More Information

Corresponding author:
Zongbiao YE, E-mail: zbye@scu.edu.cn

Jianjun WEI, E-mail: weijianjun@scu.edu.cn
Received Date: March 06, 2022
Revised Date: May 31, 2022
Accepted Date: June 05, 2022
Available Online: December 05, 2023
Published Date: October 30, 2022

Graphical Abstract

Abstract

Abstract

Self-cleaning of tin contaminants was realized utilizing a self-driven hydrogen plasma. Cleaning rates of 0.7–6 nm min^-1 were achieved for removal of discontinuous tin particles at different powers. The analysis of topography and cross-sectional morphology revealed that the removal of tin particles was achieved through top-down cleaning with hydrogen plasma, where the upper part of spherical tin particles was always more intensely cleaned under the synergistic effect of hydrogen atoms and ions due to the vertical incidence of ions to the substrate during the whole cleaning process. Redeposition of tin atoms caused by physical sputtering and its promotion of the chemical cleaning effect was observed for the first time. Reflectance recovery measurements during cleaning and surface analysis of the substrate after cleaning indicated that nondestructive cleaning with a reflectance loss of less than 1% can be achieved at a relatively low power of 120 W. Plasma-induced substrate damage, such as holes and valleys, reduced the reflectance of the substrate when cleaning was performed at a high power greater than 120 W, so this method should only be considered for application under conditions without substrate exposure. This study provides a comprehensive understanding of the removal of discontinuous tin particles using the in situ self-driven plasma cleaning method, and also provides meaningful guidance for the extension of this method in other potential fields of application.
- plasma,
- plasma,
- material,
- material,
- cleaning,
- cleaning

FullText(HTML)

Acknowledgments

This work has been funded by National Key Research, Development Program of China (No. 2017YFE0301305-KYWX-002), Sichuan Science and Technology Program (No. 2021YFSY0015) and Institutional Research Fund from Sichuan University (No. 2020SCUNL211).

References (38)

References

[1]	Lu R S et al 2013 Appl. Mech. Mater. 397–400 25 doi: 10.4028/www.scientific.net/AMM.397-400.25
[2]	van der Donck J C J et al 2015 Solid State Phenom. 219 134 doi: 10.4028/www.scientific.net/SSP.219.134
[3]	Magelli M et al 2021 Mater. Sci. Eng. 1038 012001 doi: 10.1088/1757-899X/1038/1/012001
[4]	Filin S A et al 2017 AIP Conf. Proc. 1915 040016
[5]	Küppers J 1995 Surf. Sci. Rep. 22 249 doi: 10.1016/0167-5729(96)80002-1
[6]	Braginsky O V et al 2012 J. Appl. Phys. 111 9 doi: 10.1063/1.4709408
[7]	Jacob W and Roth J 2007 Chemical sputtering Sputtering by Particle Bombardment ed R Behrisch and W Eckstein (Berlin: Springer) p 329
[8]	Shigin P et al 2021 Fusion Eng. Des. 164 112162 doi: 10.1016/j.fusengdes.2020.112162
[9]	Soni K et al 2019 Nucl. Mater. Energy 21 100702 doi: 10.1016/j.nme.2019.100702
[10]	Yan R et al 2018 Nucl. Fusion 58 026008 doi: 10.1088/1741-4326/aa96b8
[11]	Zhou Y et al 2006 Fusion Eng. Des. 81 2823 doi: 10.1016/j.fusengdes.2006.07.030
[12]	Moser L et al 2016 Phys. Scr. T167 014069 doi: 10.1088/0031-8949/T167/1/014069
[13]	Ushakov A et al 2018 Fusion Eng. Des. 131 54 doi: 10.1016/j.fusengdes.2018.04.047
[14]	Morris O et al 2007 J. Phys. Conf. Ser. 58 391 doi: 10.1088/1742-6596/58/1/089
[15]	Seisyan R P 2005 Tech. Phys. 50 535 doi: 10.1134/1.1927207
[16]	Shin H, Raju R and Ruzic N D 2009 Proc. SPIE 7271 727131 doi: 10.1117/12.813353
[17]	Sporre J et al 2012 Proc. SPIE 8322 83222L
[18]	Zhang Z Y et al 2019 Appl. Surf. Sci. 475 143 doi: 10.1016/j.apsusc.2018.12.156
[19]	Elg D T et al 2018 Plasma Chem. Plasma Process. 38 917 doi: 10.1007/s11090-018-9882-6
[20]	Elg D T et al 2016 J. Vac. Sci. Technol. A 34 021305 doi: 10.1116/1.4942456
[21]	Lim J M, Jeon B Y and Lee C 2001 Mater. Chem. Phys. 70 129 doi: 10.1016/S0254-0584(00)00481-8
[22]	Jeon B Y and Lee C 2000 Mater. Chem. Phys. 63 13 doi: 10.1016/S0254-0584(99)00190-X
[23]	ElgD T2016Removal of tin from exterme ultraviolet collector optics by an [italic]in situ[/italic] hydrogen plasmaPhD ThesisUniversity of Illinois at Urbana-Champaign, Champagne
[24]	Panning E M et al 2017 Proc. SPIE 10143 101432I
[25]	Kerkhof M et al 2020 Proc. SPIE 11323 113230Y
[26]	Davis J W, Haasz A A and Stangeby P C 1988 J. Nucl. Mater. 155–157 234 doi: 10.1016/0022-3115(88)90246-2
[27]	Qerimi D et al 2020 J. Vac. Sci. Technol. B 38 052601 doi: 10.1116/6.0000200
[28]	Wiberg E and Amberger E 1971 Hydrides of the Elements of Main Groups Ⅰ-Ⅳ (Amsterdam: Elsevier)
[29]	Watanabe T and Okumiya H 2004 Sci. Technol. Adv. Mater. 5 639 doi: 10.1016/j.stam.2004.03.015
[30]	Teramoto Y et al 2007 Proc. SPIE 6517 65173R doi: 10.1117/12.728711
[31]	Ugur D et al 2012 Chem. Phys. Lett. 552 122 doi: 10.1016/j.cplett.2012.09.054
[32]	Moser L et al 2017 Nucl. Fusion 57 086019 doi: 10.1088/1741-4326/aa73e2
[33]	Behrisch R and Eckstein W 2007 Sputtering by Particle Bombardment (Berlin: Springer)
[34]	Wolff L B 1992 Spectral and Polarization Stereo Methods Using A Single Light Source (Sudbury: Jones and Bartlett Publishers Inc.)
[35]	Peng J et al 2018 Fusion Eng. Des. 128 107 doi: 10.1016/j.fusengdes.2018.01.061
[36]	van Veldhoven J et al 2021 IEEE Trans. Plasma Sci. 49 3132 doi: 10.1109/TPS.2021.3110423
[37]	Moser L et al 2017 Phys. Scr. T170 014047 doi: 10.1088/1402-4896/aa8f30
[38]	Shin H et al 2010 Proc. SPIE 7636 76360B doi: 10.2175/193864710798207792

Cited By

Cited by

Periodical cited type(8)

1.	Orgen, S.B., Dela Pena, E.M.B. Microstructure and Corrosion Behavior of PEO-Coated AA7075 Under Pulsed Unipolar Potential Control Mode. Coatings, 2024, 14(12): 1498. DOI:10.3390/coatings14121498
2.	Sun, S., Shang, J. Improved wear and corrosion resistance of MoS2/MgO/MgAl2O4 composite layer in-situ prepared by one-step micro-arc oxidation. Materials Today Communications, 2024. DOI:10.1016/j.mtcomm.2024.110151
3.	Hu, Q., Li, X., Ruan, Y. et al. Friction Reduction of Aluminum Alloy Micro-arc Oxidation Coating by Filling Graphene Oxide. Journal of Materials Engineering and Performance, 2024. DOI:10.1007/s11665-024-09666-2
4.	Wang, G., Song, J., Zhao, G. et al. Improving output performance of ultrasonic motor by coating MoS2 on the stator. Tribology International, 2023. DOI:10.1016/j.triboint.2023.108608
5.	Wang, S., Yu, Q., Wang, X. et al. SiO2 passivated TaS2 saturable absorber mirrors for the ultrafast pulse generation. Journal of Alloys and Compounds, 2022. DOI:10.1016/j.jallcom.2022.165742
6.	Zhu, L., Wang, Z., Li, C. et al. Highly stable 1T-MoS2 by magneto-hydrothermal synthesis with Ru modification for efficient hydrogen evolution reaction. Journal of Materials Chemistry A, 2022. DOI:10.1039/d2ta05954a
7.	Tsai, D.-S., Chou, C.-C. Influences of growth species and inclusions on the current–voltage behavior of plasma electrolytic oxidation: A review. Coatings, 2021, 11(3): 1-21. DOI:10.3390/coatings11030270
8.	Esmaeili, M., Tadayonsaidi, M., Ghorbanian, B. The effect of PEO parameters on the properties of biodegradable Mg alloys: A review. Surface Innovations, 2020, 9(4): 184-198. DOI:10.1680/jsuin.20.00057