Citation: | R PAUL, K DEKA, G SHARMA, R MOULICK, S ADHIKARI, S S KAUSIK, B K SAIKIA. Study of a collisionless magnetized plasma sheath with nonextensively distributed species[J]. Plasma Science and Technology, 2023, 25(12): 125001. DOI: 10.1088/2058-6272/ace1d4 |
A weakly magnetized sheath for a collisionless, electronegative plasma comprising positive ions, electrons, and negative ions is investigated numerically using the fluid approach. The electrons are considered to be non-Maxwellian in nature and are described by Tsalli's distribution. Such electrons have a substantial effect on the sheath properties. The study also reveals that non-Maxwellian distribution is the most realistic description for negative ions in the presence of an oblique magnetic field. In addition to the negative ion temperature, the sheath potential is also affected by the nonextensive parameters. The present research finds application in the plasma processing and semiconductor industry as well as in space plasmas.
[1] |
Chodura R 1982 Phys. Fluids
25 1628 doi: 10.1063/1.863955
|
[2] |
Beilis I I and Keidar M 1998 Phys. Plasmas
5 1545 doi: 10.1063/1.872813
|
[3] |
Valentini H B and Kaiser D 2014 Plasma Sources Sci. Technol.
23 015004 doi: 10.1088/0963-0252/23/1/015004
|
[4] |
Moulick R, Adhikari S and Goswami K 2019 Phys. Plasmas
26 043512 doi: 10.1063/1.5090537
|
[5] |
Paul R et al 2020 Phys. Plasmas
27 063520 doi: 10.1063/5.0004796
|
[6] |
Sharma G et al 2020 Phys. Scr.
95 035605 doi: 10.1088/1402-4896/ab5548
|
[7] |
Deka K et al 2021 Phys. Scr.
96 075606 doi: 10.1088/1402-4896/abfc81
|
[8] |
Bergmann A 1994 Phys. Plasmas
1 3598 doi: 10.1063/1.870895
|
[9] |
Asano K et al 2010 J. Plasma Fusion Res. Ser.
9 563(www.jspf.or.jp/JPFRS/PDF/Vol9/jpfrs2010_09-563.pdf)
|
[10] |
Tskhakaya D and Kuhn S 2003 J. Nucl. Mater.
313–316 1119 doi: 10.1016/S0022-3115(02)01548-9
|
[11] |
Adhikari S, Moulick R and Goswami K S 2018 Phys. Plasmas
25 094504 doi: 10.1063/1.5045186
|
[12] |
Schiesko L, Wünderlich D and Montellano I M 2020 J. Appl. Phys.
127 033302 doi: 10.1063/1.5132596
|
[13] |
Leubner M P 2004 Phys. Plasmas
11 1308 doi: 10.1063/1.1667501
|
[14] |
Valentini F 2005 Phys. Plasmas
12 072106 doi: 10.1063/1.1947967
|
[15] |
Abid A A et al 2017 Phys. Plasmas
24 033702 doi: 10.1063/1.4977447
|
[16] |
Hori T et al 1996 Appl. Phys. Lett.
69 3683 doi: 10.1063/1.117188
|
[17] |
Safa N N, Ghomi H and Niknam A R 2015 J. Plasma Physics
81 905810303 doi: 10.1017/S0022377814000981
|
[18] |
Kakati B et al 2011 Phys. Plasmas.
18 033705 doi: 10.1063/1.3568841
|
[19] |
Sharma G et al 2022 Plasma Sources Sci. Technol.
31 025013 doi: 10.1088/1361-6595/ac4c4b
|
[20] |
Hatami M M 2015 Phys. Plasmas
22 013508 doi: 10.1063/1.4906355
|
[21] |
Taccogna F et al 2007 J. Nucl. Mater.
363–365 437 doi: 10.1016/j.jnucmat.2007.01.039
|
[22] |
Tsallis C 1988 J. Stat. Phys.
52 479 doi: 10.1007/BF01016429
|
[23] |
Du J 2010 On the Power-Law q-Distribution Function Based on the Probabilistically Independent Postulate in Nonextensive Statistics 1
|
[24] |
Du J 2004 Europhys. Lett.
67 893 doi: 10.1209/epl/i2004-10145-2
|
[25] |
Tsallis C, Mendes R and Plastino A R 1998 Physica A
261 534 doi: 10.1016/S0378-4371(98)00437-3
|
[26] |
Qiu H et al 2020 Phys. Rev. E 101 043206 doi: 10.1103/PhysRevE.101.043206
|
[27] |
Shalini, Saini N S and Misra A P 2015 Phys. Plasmas
22 092124 doi: 10.1063/1.4931074
|
[28] |
Tribeche M and Shukla P K 2011 Phys. Plasmas
18 103702 doi: 10.1063/1.3641967
|
[29] |
El Taibany W F and Tribeche M 2012 Phys. Plasmas
19 024507 doi: 10.1063/1.3684232
|
[30] |
Gougam L A and Tribeche M 2011 Phys. Plasmas
18 062102 doi: 10.1063/1.3577599
|
[31] |
Moulick R, Garg A and Kumar M 2021 Contrib. Plasma Phys.
61 e202100047 doi: 10.1002/ctpp.202100047
|
[32] |
Borgohain D R, Saharia K and Goswami K S 2016 Phys. Plasmas
23 122113 doi: 10.1063/1.4972072
|
[33] |
Borgohain D R and Saharia K 2018 Phys. Plasmas
25 032122 doi: 10.1063/1.5005582
|
[34] |
Asserghine A, El Kaouini M and Chatei H 2020 Materials Today: Proceedings
24 24 doi: 10.1016/j.matpr.2019.07.439
|
[35] |
Aslaninejad M and Yasserian K 2012 Phys. Plasmas
19 033504 doi: 10.1063/1.3690101
|
[36] |
Crespo R M et al 2012 Plasma Sources Sci. Technol.
21 055026 doi: 10.1088/0963-0252/21/5/055026
|
[37] |
Yasserian K, Aslaninejad M and Ghoranneviss M 2009 Phys. Plasmas
16 023504 doi: 10.1063/1.3077304
|
[38] |
Malik H K and Dhawan R 2020 IEEE Trans. Plasma Sci.
48 2408 doi: 10.1109/TPS.2020.2998717
|
[39] |
Kogut D et al 2017 Plasma Sources Sci. Technol.
26 045006 doi: 10.1088/1361-6595/aa5d7b
|
[40] |
Abid A A et al 2016 Phys. Plasmas
23 013706 doi: 10.1063/1.4940329
|
[41] |
Stoffels E, Stoffels W W and Kroesen G M W 2001 Plasma Sources Sci. Technol.
10 311 doi: 10.1088/0963-0252/10/2/321
|
[42] |
Palop J I F et al 1996 J. Appl. Phys.
80 4282 doi: 10.1063/1.363388
|
[43] |
Dubois J P J et al 2016 J. Appl. Phys.
119 193301 doi: 10.1063/1.4948949
|
[44] |
Ohtake H and Samukawa S 1996 Appl. Phys. Lett.
68 2416 doi: 10.1063/1.116152
|
[45] |
Yasserian K and Aslaninejad M 2010 Phys. Plasmas
17 023501 doi: 10.1063/1.3310837
|
[46] |
Kakati B et al 2017 Sci. Rep.
7 11078 doi: 10.1038/s41598-017-10685-4
|
[47] |
Adhikari S, Moulick R and Goswami K S 2017 Phys. Plasmas
24 083501 doi: 10.1063/1.4994535
|
[48] |
Gyergyek T and Kovačič J 2015 Phys. Plasmas
22 043502 doi: 10.1063/1.4916318
|
[49] |
El Ghani O, Driouch I and Chatei H 2020 Phys. Plasmas
27 083701 doi: 10.1063/5.0010080
|
[50] |
Zou X et al 2020 Plasma Sci. Technol.
22 125001 doi: 10.1088/2058-6272/abb3dc
|
[51] |
Forrest J R and Franklin R N 1968 J. Phys. D
1 1357 doi: 10.1088/0022-3727/1/10/316
|
[52] |
Valentini H B 2000 Plasma Sources Sci. Technol.
9 574 doi: 10.1088/0963-0252/9/4/313
|
[53] |
Moulick R and Goswami K S 2015 Phys. Plasmas
22 033510 doi: 10.1063/1.4915070
|
[54] |
Bacal M et al 1991 J. Appl. Phys.
70 1212-12191212 doi: 10.1063/1.349575
|
[55] |
Allen J E 2009 Plasma Sources Sci. Technol.
18 014004 doi: 10.1088/0963-0252/18/1/014004
|
1. | Jdaini, O., Missaoui, A., El Bojaddaini, M. et al. Comparative Analysis of Plasma Sheath Characteristics in One-Dimensional and Three-Dimensional Velocity Spaces Governing Nonextensive Electron Density. Contributions to Plasma Physics, 2025. DOI:10.1002/ctpp.202400094 |
2. | Eljabiri, Z., El Ghani, O., Driouch, I. et al. Total secondary emission effect on the complex plasma sheath with superextensive electrons. Journal of Plasma Physics, 2024, 90(5): 905900506. DOI:10.1017/S0022377824001193 |
3. | El Bojaddaini, M., El Kaouini, M., Chatei, H. Sheath structure behavior in collisional non-extensive plasma with negative ions. European Physical Journal Plus, 2024, 139(5): 373. DOI:10.1140/epjp/s13360-024-05112-3 |
1. | Jdaini, O., Missaoui, A., El Bojaddaini, M. et al. Comparative Analysis of Plasma Sheath Characteristics in One-Dimensional and Three-Dimensional Velocity Spaces Governing Nonextensive Electron Density. Contributions to Plasma Physics, 2025. DOI:10.1002/ctpp.202400094 |
2. | Eljabiri, Z., El Ghani, O., Driouch, I. et al. Total secondary emission effect on the complex plasma sheath with superextensive electrons. Journal of Plasma Physics, 2024, 90(5): 905900506. DOI:10.1017/S0022377824001193 |
3. | El Bojaddaini, M., El Kaouini, M., Chatei, H. Sheath structure behavior in collisional non-extensive plasma with negative ions. European Physical Journal Plus, 2024, 139(5): 373. DOI:10.1140/epjp/s13360-024-05112-3 |