Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment

LI Zebin(李泽斌); WU Zhonghang(吴忠航); JU Jiaqi(居家奇); HE Kongduo(何孔多); CHEN Zhenliu(陈枕流); YANG Xilu(杨曦露); YAN Hang(颜航); OU Qiongrong(区琼荣); LIANG Rongqing(梁荣庆)

doi:10.1088/1009-0630/16/1/17

Plasma Science and Technology > 2014 > 16(1): 79-82. > DOI: 10.1088/1009-0630/16/1/17

LI Zebin(李泽斌), WU Zhonghang(吴忠航), JU Jiaqi(居家奇), HE Kongduo(何孔多), CHEN Zhenliu(陈枕流), YANG Xilu(杨曦露), YAN Hang(颜航), OU Qiongrong(区琼荣), LIANG Rongqing(梁荣庆). Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment[J]. Plasma Science and Technology, 2014, 16(1): 79-82. DOI: 10.1088/1009-0630/16/1/17

Citation:

PDF (4335 KB)

Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment

1 Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, China 2 Engineering Research Center of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, China

Funds: supported by National Natural Science Foundation of China (Nos.11005021, 51177017 and 11175049), the Fudan University Excellent Doctoral Research Program (985 Project) and the Ph.D Programs Foundation of Ministry of Education of China (No.20120071110031)

More Information

Received Date: August 29, 2013

Graphical Abstract

Abstract

Abstract

Al-doped zinc-oxide (AZO) thin films treated by oxygen and chlorine inductively coupled plasma (ICP) were compared. Kelvin probe (KP) and X-ray photoelectron spectroscopy (XPS) were employed to characterize the effect of treatment. The results of KP measurement show that the surface work function of AZO thin films can increase up to 5.92 eV after oxygen ICP (O-ICP)’s treatment, which means that the work function was increased by at least 1.1 eV. However, after the treatment of chlorine ICP (Cl-ICP), the work function increased to 5.44 eV, and the increment was 0.6 eV. And 10 days later, the work function increment was still 0.4 eV after O-ICP’s treatment, while the work function after Cl-ICP’s treatment came back to the original value only after 48 hours. The XPS results suggested that the O-ICP treatment was more effective than Cl-ICP for enhancing the work function of AZO films, which is well consistent with KP results.
- oxygen inductively coupled plasma,
- Al-doped zinc-oxide (AZO),
- work function

FullText(HTML)

References (22)

References

1 Tang C W, Vanslyke S A. 1987, Appl. Phys. Lett., 51:913;

2 Zhao L, Zhou Z, Peng H, et al. 2005, Appl. Surf. Sci.,252: 385;

3 Bernede J C. 2008, J. Chil. Chem. Soc., 53: 1549;

4 Kamtekar K T, Monkman A P, Bryce M R. 2010, Adv.Mater., 22: 572;

5 Kim H, Pique A, Horwitz J S, et al. 1999, Appl. Phys.Lett., 74: 3444;

6 Reddy V S, Das K, Dhar A, et al. 2006, Semicond. Sci.Technol., 21: 1747;

7 Tuna O, Selamet Y, Aygun G, et al. 2010, J. Phys. D:Appl. Phys., 43: 055402;

8 Lee S T, Gao Z Q, Hung L S. 1999, Appl. Phys. Lett.,75: 1404;

9 Jo S J, Kim C S, Ryu S Y, et al. 2008, J. Appl. Phys.,103: 114502;

10 Jiang X,Wong F L, Fung M K, et al. 2003, Appl. Phys.Lett., 83: 1875;

11 Kim H, Horwitz J S, Kim W H, et al. 2002, Thin Solid Films, 420-421: 539;

12 Kim T W, Choo D C, No Y S, et al. 2006, Appl. Surf.Sci., 253: 1917;

13 Hotchkiss P J, Li H, Paramonov P B, et al. 2009, Adv.Mater., 21: 4496;

14 Cattin L, Dahou F, Lare Y, et al. 2009, J. Appl. Phys.,105: 034507;

15 Hong S J, Heo G S, Park J W, et al. 2007, J. Nanosci.Nanotechnol., 7: 4077;

16 Wang W, Feng Q, Jiang K, et al. 2011, Appl. Surf.Sci., 257: 3884;

17 Feng Q, Wang W, Jiang K, et al. 2012, J. Mater. Sci.:Mater. Electron, 23: 267;

18 Park J H, Ahn K J, Park K I, et al. 2010, J. Phys. D:Appl. Phys., 43: 115101;

19 Helander M G, Wang Z B, Qiu J, et al. 2011, Science,332: 944 20 Cao X A, Zhang Y Q. 2012, Appl. Phys. Lett., 100:183304;

21 Yu H Y, Feng X D, Grozea D, et al. 2001, Appl. Phys.Lett., 78: 2595;

22 Li W, Li D Y. 2005, J. Chem. Phys., 122: 064708 23 Song G L, Haddad D. 2011, Mater. Chem. Phys., 125:548;

24 Xue M S, Wu H N, Qu J F, et al. 2012, J. Appl. Phys.,111: 123714

[1]	X T DING (丁玄同), W CHEN (陈伟). Review of the experiments for energetic particle physics on HL-2A[J]. Plasma Science and Technology, 2018, 20(9): 94008-094008. DOI: 10.1088/2058-6272/aad27a
[2]	Zhongbing SHI (石中兵), Wulyu ZHONG (钟武律), Min JIANG (蒋敏). Progress of microwave diagnostics development on the HL-2A tokamak[J]. Plasma Science and Technology, 2018, 20(9): 94007-094007. DOI: 10.1088/2058-6272/aad27b
[3]	Chen YUAN (袁晨), Jun WU (吴军), Zejie YIN (阴泽杰). A digital wide range neutron flux measuring system for HL-2A[J]. Plasma Science and Technology, 2017, 19(8): 84004-084004. DOI: 10.1088/2058-6272/aa6bf1
[4]	LI Yonggao (李永高), ZHOU Yan (周艳), YUAN Baoshan (袁保山), DENG Zhongchao (邓中朝), ZHANG Boyu (张博宇), LI Yuan (李远), DENG Wei (邓玮), WANG Haoxi (王浩西), YI Jiang (易江), HL-A Team. Application of the Magnetic Surface Based PARK-Matrix Method in the HCOOH Laser Interferometry System on HL-2A[J]. Plasma Science and Technology, 2016, 18(12): 1198-1203. DOI: 10.1088/1009-0630/18/12/10
[5]	XIA Donghui(夏冬辉), ZHOU Jun(周俊), RAO Jun(饶军), HUANG Mei(黄梅), LU Zhihong(陆志鸿), WANG He(王贺), CHEN Gangyu(陈罡宇), WANG Chao(王超), LU Bo(卢波), ZHUANG Ge(庄革). Design of the Transmission Lines for 140 GHz ECRH System on HL-2A[J]. Plasma Science and Technology, 2014, 16(3): 267-272. DOI: 10.1088/1009-0630/16/3/17
[6]	HUANG Mei (黄梅), CHEN Gangyu (陈罡宇), ZHOU Jun (周俊), WANG Chao (王超), et al.. Development of a 140 GHz Steerable Launcher for the HL-2A ECRH System[J]. Plasma Science and Technology, 2013, 15(12): 1247-1253. DOI: 10.1088/1009-0630/15/12/16
[7]	XIA Zhiwei (夏志伟), LI Wei (李伟), YANG Qingwei (杨青巍), LU Jie (卢杰), YI Ping (易萍), GAO Jinming (高金明). Application of DEGAS for Ion Temperature Profile Reconstruction from a NPA Diagnostic on HL-2A[J]. Plasma Science and Technology, 2013, 15(2): 101-105. DOI: 10.1088/1009-0630/15/2/04
[8]	CHEN Wenguang (陈文光), RAO Jun (饶军), LI Bo (李波), LEI Guangjiu (雷光玖), CAO Jianyong (曹建勇), WANG Mingwei (王明伟), KANG Zihua (康自华), FENG Kun (冯鲲), HL-A NBI Group. Technical Design of Arc-Discharge and Deceleration Power Supply for MW Level NBI System on HL-2A Tokamak[J]. Plasma Science and Technology, 2012, 14(10): 936-940. DOI: 10.1088/1009-0630/14/10/15
[9]	HE Zhixiong, DONG Jiaqi, HE Hongda, JIANG Haibin, GAO Zhe, ZHANG Jinhua. MHD Equilibrium Configuration Reconstructions for HL-2A Tokamak[J]. Plasma Science and Technology, 2011, 13(4): 424-430.
[10]	YAO Lianghua (姚良骅), ZHAO Dawei (赵大为), FENG Beibin (冯北滨), CHEN.Chengyuan (陈程远), ZHOU Yan(周艳), HAN Xiaoyu (韩晓玉), LI Yonggao (李永高), Jerome BUCALOSSI, Duan Xuru (段旭如). Comparison of Supersonic Molecular Beam Injection from both low field side and high field side of HL-2A[J]. Plasma Science and Technology, 2010, 12(5): 529-534.