Effect of coil and chamber structure on plasma radial uniformity in radio frequency inductively coupled plasma

Yang ZHAO; Xiaohua ZHOU; Shengrong GAO; Shasha SONG; Yuzhen ZHAO

doi:10.1088/2058-6272/ad31ef

Plasma Science and Technology > 2024 > 26(7): 075402. > DOI: 10.1088/2058-6272/ad31ef

Yang ZHAO, Xiaohua ZHOU, Shengrong GAO, Shasha SONG, Yuzhen ZHAO. Effect of coil and chamber structure on plasma radial uniformity in radio frequency inductively coupled plasma[J]. Plasma Science and Technology, 2024, 26(7): 075402. DOI: 10.1088/2058-6272/ad31ef

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Effect of coil and chamber structure on plasma radial uniformity in radio frequency inductively coupled plasma

1.
Shaanxi International Joint Research Center for Applied Technology of Controllable Neutron Source, Xijing University, Xi’an 710123, People’s Republic of China
2.
Technological Institute of Materials & Energy Science (TIMES), Xi’an Key Laboratory of Advanced Photo-electronics Materials and Energy Conversion Device, School of Electronic Information, Xijing University, Xi’an 710123, People’s Republic of China

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Author Bio:
Xiaohua ZHOU: zhouxiaohua@xijing.edu.cn
Corresponding author:
Xiaohua ZHOU, zhouxiaohua@xijing.edu.cn
Received Date: January 12, 2024
Revised Date: March 06, 2024
Accepted Date: March 07, 2024
Available Online: May 16, 2024
Published Date: May 15, 2024

Graphical Abstract

Abstract

Abstract

Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma (ICP) to meet the demand for large-area and uniformly distributed plasma in industrial manufacturing. This study utilized a two-dimensional self-consistent fluid model to investigate how different coil configurations and chamber aspect ratios affect the radial uniformity of plasma in radio frequency ICP. The findings indicate that optimizing the radial spacing of the coil enhances plasma uniformity but with a reduction in electron density. Furthermore, optimizing the coil within the ICP reactor, using the interior point method in the Interior Point Optimizer significantly enhances plasma uniformity, elevating it from 56% to 96% within the range of the model sizes. Additionally, when the chamber aspect ratio k changes from 2.8 to 4.7, the plasma distribution changes from a center-high to a saddle-shaped distribution. Moreover, the plasma uniformity becomes worse. Finally, adjusting process parameters, such as increasing source power and gas pressure, can enhance plasma uniformity. These findings contribute to optimizing the etching process by improving plasma radial uniformity.
- inductively coupled plasma,
- fluid simulation,
- optimized coil,
- chamber aspect ratio,
- plasma uniformity

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Acknowledgments

This work was supported by the Scientific Research Foundation of Xijing University, China (No. XJ19T03), the Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory (No. ZHD201701), and the Natural Science Basic Research Plan in Shaanxi Province of China (No. 2024JC-YBMS-342).

References (32)

References

[1]	Hopwood J 1992 Plasma Sources Sci. Technol. 1 109 doi: 10.1088/0963-0252/1/2/006
[2]	Lee H C 2018 Appl. Phys. Rev. 5 011108 doi: 10.1063/1.5012001
[3]	Mackie N M et al 1997 Chem. Mater. 9 349 doi: 10.1021/cm960388q
[4]	Park J H et al 2006 Appl. Phys. Lett. 89 121108 doi: 10.1063/1.2356075
[5]	Charles C 2009 J. Phys. D: Appl. Phys. 42 163001 doi: 10.1088/0022-3727/42/16/163001
[6]	Mazouffre S 2016 Plasma Sources Sci. Technol. 25 033002 doi: 10.1088/0963-0252/25/3/033002
[7]	Hagelaar G J M, Fubiani G and Boeuf J P 2011 Plasma Sources Sci. Technol. 20 015001 doi: 10.1088/0963-0252/20/1/015001
[8]	Boeuf J P et al 2011 Plasma Sources Sci. Technol. 20 015002 doi: 10.1088/0963-0252/20/1/015002
[9]	Santoso J et al 2015 Phys. Plasmas 22 093513 doi: 10.1063/1.4931469
[10]	Sun X Y et al 2021 Plasma Sci. Technol. 23 095404 doi: 10.1088/2058-6272/ac0c6b
[11]	Son E J, Cho S H and Lee H J 2020 J. Electr. Eng. Technol. 15 2259 doi: 10.1007/s42835-020-00497-4
[12]	Xiao D Z et al 2020 Surf. Coat. Technol. 400 126252 doi: 10.1016/j.surfcoat.2020.126252
[13]	Lu C et al 2023 Phys. Plasmas 30 063506 doi: 10.1063/5.0145117
[14]	Collison W Z, Ni T Q and Barnes M S 1998 J. Vac. Sci. Technol. A 16 100 doi: 10.1116/1.580955
[15]	Kim K N et al 2006 Appl. Phys. Lett. 89 251501 doi: 10.1063/1.2405417
[16]	Gweon G H et al 2010 Vacuum 84 823 doi: 10.1016/j.vacuum.2009.10.051
[17]	Mishra A et al 2012 Plasma Sources Sci. Technol. 21 035018 doi: 10.1088/0963-0252/21/3/035018
[18]	Yang K C et al 2019 Vacuum 168 108802 doi: 10.1016/j.vacuum.2019.108802
[19]	Levko D, Shukla C and Raja L L 2021 J. Vac. Sci. Technol. B 39 062204 doi: 10.1116/6.0001293
[20]	Stittsworth J A and Wendt A E 1996 Plasma Sources Sci. Technol. 5 429 doi: 10.1088/0963-0252/5/3/011
[21]	Hao Z Y et al 2020 Phys. Plasmas 27 043502 doi: 10.1063/1.5143099
[22]	Mirza M M et al 2012 J. Vac. Sci. Technol. B 30 06FF02 doi: 10.1116/1.4755835
[23]	Li J S et al 2008 J. Appl. Phys. 103 043505 doi: 10.1063/1.2885158
[24]	Wächter A and Biegler L T 2006 Math. Program. 106 25 doi: 10.1007/s10107-004-0559-y
[25]	Bukowski J D, Graves D B and Vitello P 1996 J. Appl. Phys. 80 2614 doi: 10.1063/1.363169
[26]	Lee I, Graves D B and Lieberman M A 2008 Plasma Sources Sci. Technol. 17 015018 doi: 10.1088/0963-0252/17/1/015018
[27]	Wang Y J et al 2021 Plasma Sci. Technol. 23 115602 doi: 10.1088/2058-6272/ac199d
[28]	Si X J et al 2011 Phys. Plasmas 18 033504 doi: 10.1063/1.3566007
[29]	Sobolewski M A and Kim J H 2007 J. Appl. Phys. 102 113302 doi: 10.1063/1.2815674
[30]	Zhou J C et al 2022 Vacuum 195 110678 doi: 10.1016/j.vacuum.2021.110678
[31]	Zhang Y R, Hu Y T and Wang Y N 2020 Plasma Sources Sci. Technol. 29 084003 doi: 10.1088/1361-6595/ab9350
[32]	Li J et al 2020 J. Phys.: Conf. Ser. 1601 022044 doi: 10.1088/1742-6596/1601/2/022044

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1.	Jiang, D., Yip, C.-S., Jin, C.-Y. et al. Experimental verification of laser-induced fluorescence based on the velocity distribution of helium ash in multi-dipole device \| [基于多偶极腔体的氦灰激光诱导荧光诊断实验验证研究]. Hejubian Yu Dengliziti Wuli/Nuclear Fusion and Plasma Physics, 2024, 44(2): 242-248. DOI:10.16568/j.0254-6086.202402017
2.	Shi, B., Jin, C., Yip, C.-S. et al. Optical System Design for Laser-Induced Fluorescence Study of Helium Atoms on the Linear Plasma Device. Fusion Science and Technology, 2024. DOI:10.1080/15361055.2024.2309089
3.	Yip, C.-S., Jiang, D., Jin, C. et al. Recent development of LIF diagnostics in ASIPP. Journal of Instrumentation, 2023, 18(10): C10004. DOI:10.1088/1748-0221/18/10/C10004
4.	Romadanov, I., Raitses, Y. A confocal laser-induced fluorescence diagnostic with an annular laser beam. Review of Scientific Instruments, 2023, 94(7): 073002. DOI:10.1063/5.0147669
5.	Luan, C.-Y., Xu, G.-S., Yip, C.-S. et al. Experimental study of fluorescence frequency limit in LIF diagnosis \| [激光诱导荧光诊断中荧光频率极限的实验研究]. Hejubian Yu Dengliziti Wuli/Nuclear Fusion and Plasma Physics, 2023, 43(1): 112-116. DOI:10.16568/j.0254-6086.202301019
6.	Jiang, D., Jin, C.-Y., Yip, C.-S. et al. Probabilistic effect of metastable excitation on lock-in amplified plasma laser-induced fluorescence diagnostics at modulation frequencies comparable to the fluorescence frequency. Journal of Plasma Physics, 2022, 88(3): 905880307. DOI:10.1017/S0022377822000381
7.	Jiang, D., Yip, C.-S., Jin, C.-Y. et al. Observation of non-thermal metastable ion velocity distributions in a miniaturized multi-dipole confined plasma device. Physics of Plasmas, 2022, 29(6): 063504. DOI:10.1063/5.0090948
8.	Jiang, D., Yip, C.-S., Zhang, W. et al. A simple replacement of tungsten filament hot cathodes by DC heated LaB6rod and its noise characteristics with laser-induced fluorescence. Review of Scientific Instruments, 2021, 92(12): 123503. DOI:10.1063/5.0071496

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Effect of coil and chamber structure on plasma radial uniformity in radio frequency inductively coupled plasma

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