Simulation of mode transitions in capacitively coupled Ar/O<sub>2</sub> plasmas

Xiangmei LIU; Shuren ZHANG; Shuxia ZHAO; Hongying LI; Xiaohui REN

doi:10.1088/2058-6272/ad668d

Plasma Science and Technology > 2024 > 26(11): 115401. > DOI: 10.1088/2058-6272/ad668d

Xiangmei LIU, Shuren ZHANG, Shuxia ZHAO, Hongying LI, Xiaohui REN. Simulation of mode transitions in capacitively coupled Ar/O₂ plasmas[J]. Plasma Science and Technology, 2024, 26(11): 115401. DOI: 10.1088/2058-6272/ad668d

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Simulation of mode transitions in capacitively coupled Ar/O₂ plasmas

1.
School of Science, Qiqihar University, Qiqihar 161006, People’s Republic of China
2.
School of Physics, Dalian University of Technology, Dalian 116024, People’s Republic of China

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Author Bio:
Xiangmei LIU: lxmjsc98@163.com

Shuxia ZHAO: zhaonie@dlut.edu.cn
Corresponding author:
Xiangmei LIU, lxmjsc98@163.com

Shuxia ZHAO, zhaonie@dlut.edu.cn
Received Date: April 06, 2024
Revised Date: July 21, 2024
Accepted Date: July 22, 2024
Available Online: July 23, 2024
Published Date: September 18, 2024

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Abstract

Abstract

In this work, the effects of the frequency, pressure, gas composition, and secondary-electron emission coefficient on the discharge mode in capacitively coupled Ar/O₂ plasmas were carefully studied through simulations. Three discharge modes, i.e., α, γ, and drift-ambipolar (DA), were considered in this study. The results show that a mode transition from the γ-DA hybrid mode dominated by the γ mode to the DA-α hybrid mode dominated by the DA mode is induced by increasing the frequency from 100 kHz to 40 MHz. Furthermore, the electron temperature decreases with increasing frequency, while the plasma density first decreases and then increases. It was found that the electronegativity increases slightly with increasing pressure in the low-frequency region, and it increases notably with increasing pressure in the high-frequency region. It was also observed that the frequency corresponding to the mode transition from γ to DA decreased when the secondary-electron emission coefficient was decreased. Finally, it was found that increasing the oxygen content weakens the γ mode and enhances the DA mode. More importantly, the density of oxygen atoms and ozone will increase greatly with increasing oxygen content, which is of great significance for industrial applications.
- mode transition,
- processing parameters,
- Ar/O₂ discharges

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Acknowledgments

This work was supported by National Natural Science Foundation of China (Nos. 11805107 and 12275039), and the Fundamental Research Funds in Heilongjiang Provincial Universities of China (No. 145309625).

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